Method for producing diamond-like carbon coatings using PECVD and diamondoid precursors on internal surfaces of a hollow component
View Patent ↗A method of forming a diamond-like carbon coating by plasma enhanced chemical vapor deposition on an internal surface of a hollow component having an inner surface. A reduced atmospheric pressure is created within a pipe or other hollow component to be treated. A diamondoid precursor gas is introduced to the interior of the component. A bias voltage is established between a first electrode and one or more second electrodes. The first electrode is or is attached to the component. The second electrode is externally offset from an opening of the component, by a hollow insulator. A plasma region is established adjacent an inner surface of the component and extends through the hollow insulator. The precursor gas comprises at least one diamondoid. The pressure and bias voltage are selected such as to cause the deposition of diamond-like carbon on the inner surface.
1. A method of forming a diamond-like carbon coating by plasma enhanced chemical vapor deposition on an internal surface of a hollow component having an inner surface, the method comprising the steps of:
(a) creating a reduced atmospheric pressure within a hollow component to be treated;
(b) introducing a diamondoid precursor gas to the interior of said hollow component;
(c) establishing a bias voltage between a first electrode and one or more second electrodes, at least one of said one or more second electrodes being externally offset from an opening of said component by a hollow insulator that is attached to said hollow component; and
(d) establishing a plasma region adjacent an inner surface of said hollow component, said plasma region extending through the hollow insulator;
wherein said diamondoid precursor gas comprises at least one diamondoid and wherein said pressure and bias voltage are selected such as to cause the deposition of diamond-like carbon on said surface.
2. The method of claim 1 wherein said pressure and bias voltage are above 20 m Torr and 500V respectively.
3. The method of claim 1 including a step of creating the plasma region by means of establishing a hollow cathode effect plasma.
4. The method of claim 1 wherein the deposition rate is greater than 10 μm/hr.
5. The method of claim 1 wherein said precursor is selected from the group consisting of adamantane, diamantane, and triamantane.
6. The method of claim 5 wherein said precursor is alkylated.
7. The method of claim 1 wherein said diamondoid precursor is 1,3 diamethyl-adamantane.
8. The method of claim 1 wherein said adamantane is present as a percentage of between 10% and 100% in another reactive gas.
9. The method of claim 1 wherein the pressure is between 20 mTorr and 300 mTorr and the bias voltage is between 500V and 3000V.
10. The method of claim 1 further comprising the step of introducing a hydrocarbon with the diamondoid precursor.
11. The method of claim 10 wherein the hydrocarbon is in the form of C 2 H 2 or C 4 H 8 .
12. The method of claim 1 further comprising the step of adding a metal to the precursor.
13. The method of claim 12 wherein said metal is tetrakisdimethylamino-titanium (TDMAT).
14. The method of claim 1 further comprising the step of layering diamondoid without any other reactive gas, and other reactive gases with or without diamondoid, to form composite coatings.
15. The method of claim 1 further comprising the step of adding a dopant to said diamondoid precursor.
16. The method of claim 15 wherein said dopant is selected from the group consisting of N 2 , silicon, germanium, TDMAT, and other metals containing MOCVD precursor.
17. A method of forming a diamond-like carbon coating on an internal surface of a pipe by plasma enhanced chemical vapor deposition the method comprising the steps of:
(a) creating a reduced atmospheric pressure within a pipe to be treated;
(b) introducing a diamondoid precursor gas to the interior of said pipe;
(c) establishing a bias voltage between a first electrode and one or more second electrodes, each of said one or more second electrodes being externally offset from an opening of said pipe by a respective hollow insulator that is attached to said pipe such that each of said one or more second electrodes is an anode remote from said pipe; and
(d) establishing a hollow cathode plasma region adjacent said inner surface and extending from said one or more second electrodes through said hollow insulator;
wherein, said diamondoid precursor gas comprises at least one diamondoid and said pressure and bias voltage are above 20 mTorr and 500V respectively, such as to cause the deposition of diamond-like carbon on said surface.
18. The method of claim 17 further comprising the step of attaching said first electrode to said pipe and biasing said pipe as a cathode and biasing one or more second electrodes as anodes remote therefrom, and establishing a hollow cathode plasma within said pipe.