Semiconductor device and method for fabricating the same
View Patent ↗A semiconductor device including at least one drift region formed near a channel region on a substrate, a first buried insulating layer formed in the drift region, and a first reduced surface field region interposed between the first buried insulating layer and the drift region. Accordingly, the semiconductor device provides first reduced surface field regions arranged between drift regions and first buried insulating layers, thus having advantages of improved junction integrity, suitability for LDMOS transistors employing a high operation voltage and reduced total size.
1. A semiconductor device comprising:
a drift region formed adjacent a channel region in a substrate;
a first buried insulating layer formed in the drift region;
a first reduced surface field region interposed between the first buried insulating layer and the drift region;
a second buried insulating layer formed in the substrate defining an active region and a device isolation region; and
a second reduced surface field region interposed between the second buried insulating layer and the substrate.
2. The semiconductor device of claim 1 , wherein when the substrate has a first conductive type and the drift region has a second conductive type, the first reduced surface field region has the first conductive type.
3. The semiconductor device of claim 1 , wherein when the substrate has a first conductive type and the drift region has a second conductive type, the first reduced surface field region has the second conductive type.
4. The semiconductor device of claim 1 , wherein the drift region is formed in a well formed in the substrate.
5. The semiconductor device of claim 4 , wherein the second buried insulating layer is formed over the well and the drift region.
6. The semiconductor device of claim 4 , wherein the second buried insulating layer is formed in a portion of the well other than the drift region.
7. The semiconductor device of claim 4 , further comprising:
a gate formed in the channel region on the well; and
a source/drain region formed in the drift region interposed between the first buried insulating layer and the second buried insulating layer.
8. A method for fabricating a semiconductor device comprising:
forming a drift region adjacent a channel region on a substrate;
forming a first trench in the drift region;
forming a first reduced surface field region on the inner wall of the first trench;
forming a first buried insulating layer on the first trench including the first buried insulating layer;
forming a second trench on the substrate defining an active region and a device isolation region, during formation of the first trench; and then
forming a second reduced surface field region on the inner walls of the second trench.
9. The method of claim 8 , wherein when the substrate has a first conductive type and the drift region has a second conductive type, the first reduced surface field region is formed by implanting the first conductive type of impurity ions in the inner walls of the first trench.
10. The method of claim 8 , wherein when the substrate has a first conductive type and the drift region has a second conductive type, the first reduced surface field region is formed by implanting the second conductive type of impurity ions in the inner walls of the first trench.
11. The method of claim 9 , wherein the first conductive type is p-type, the second conductive type is n-type and the impurity ions comprise arsenic.
12. The method of claim 8 , wherein the drift region is formed in a well formed in the substrate.
13. The method of claim 12 , wherein the second trench is formed in the well and the drift region.
14. The method of claim 12 , wherein the second trench is formed in a portion of the well other than the drift region.
15. The method of claim 12 , further comprising:
forming a second buried insulating layer on the second trench including the second reduced surface field region; and then
forming a gate in the channel region on the well; and then
forming a source/drain region in the drift region between the first buried insulating layer and the second buried insulating layer.