Method for forming fine pattern of semiconductor device
View Patent ↗A method for forming a fine pattern of a semiconductor device which includes sequentially forming a non-etching layer and a sacrificial layer on a semiconductor substrate; and then forming a plurality of photo-resist layer patterns having a plurality of openings exposing the sacrificial layer; and then forming a plurality of first pattern grooves in the sacrificial layer etching the exposed sacrificial layer using the photo-resist patterns as an etching barrier; removing the photo-resist layer; and then forming an oxidation layer having a plurality of second pattern grooves on the sacrificial layer and in the first pattern grooves by performing a thermal oxidation process on the sacrificial layer; and then forming a plurality of first through-holes exposing the non-etching layer by completely removing the sacrificial layer remaining in oxidation layer; and then forming a plurality of patterns in the non-etching layer by etching the exposed portions of the non-etching layer using the oxidation layer as an etching barrier.
1. A method comprising:
sequentially forming a non-etching layer and a sacrificial layer on a semiconductor substrate; and then
forming a plurality of photo-resist layer patterns having a plurality of openings exposing the sacrificial layer; and then
forming a plurality of first pattern grooves in the sacrificial layer by etching the exposed sacrificial layer to a predetermined depth using the photo-resist patterns as an etching barrier, wherein the predetermined depth is smaller than a thickness of the exposed sacrificial layer before being etched;
removing the photo-resist layer; and then
performing a thermal oxidation process on the sacrificial layer such that a plurality of sacrificial layer patterns spaced apart from each other are formed on the non-etching layer and an oxidation layer is formed on the sacrificial layer patterns and the non-etching layer, wherein the sacrificial layer patterns have a width smaller than a distance between the first pattern grooves and the oxidation layer has a plurality of second pattern grooves disposed between the sacrificial layer patterns; and then
forming a plurality of first through-holes exposing the non-etching layer by completely removing the sacrificial layer patterns; and then
forming a plurality of patterns in the non-etching layer by etching the exposed portions of the non-etching layer using the oxidation layer as an etching barrier.
2. The method of claim 1 , wherein forming the photo-resist patterns comprises:
coating a photo-resist layer on the sacrificial layer; and then
exposing and developing the photo-resist layer to form the openings.
3. The method of claim 1 , wherein the width of the sacrificial layer patterns is equal to the width of the second pattern grooves.
4. The method of claim 1 , further comprising, before forming the plurality of first through-holes and after forming the oxidation layer, exposing the uppermost surface of the sacrificial layer patterns by performing chemical mechanical polishing process.
5. The method of claim 1 , further comprising, after forming the plurality of patterns in the non-etching layer, removing the oxidation layer.
6. The method of claim 5 , wherein the oxidation layer is removed by performing at least one of a dry etching process, a wet etching process and a CMP process.
7. The method of claim 1 , wherein the thermal oxidation process is performed using oxygen O 2 gas.
8. The method of claim 1 , wherein the sacrificial layer is composed of titanium.