Method for forming self-alignment insulation structure
View Patent ↗A method for forming a self-align insulation of a passing gate is disclosed. First, a substrate is provided. A deep trench filled with silicon material and a shallow trench isolation adjacent to the deep trench are formed in the substrate. A patterned pad oxide and a patterned hard mask are sequentially formed on the substrate. The patterned pad oxide and the patterned hard mask together define the opening of the deep trench. Then, an oxidation step is carried out to form a first oxide layer serving as the insulation of a passing gate on the top surface of the silicon material of the deep trench. Later, a first Si layer is formed to cover the first oxide layer. Afterwards, the hard mask is removed.
1. A method of forming an insulation structure, comprising:
providing a substrate comprising a deep trench filled with silicon and a shallow trench isolation adjacent to said deep trench, and sequentially forming on said substrate a patterned pad oxide layer and a patterned hard mask, wherein said patterned pad oxide layer and said patterned hard mask together define an opening of said deep trench;
reacting said silicon in said deep trench by performing an oxidation to form a first oxidation layer on the surface of said silicon in said deep trench;
forming a first silicon layer covering said first oxidation layer in said opening; and
removing said hard mask.
2. The method of claim 1 , wherein said hard mask comprises a nitride, a oxynitride, a carbide or the combination thereof.
3. The method of claim 1 , wherein said oxidation is a thermal oxidation.
4. The method of claim 1 , wherein forming said first silicon layer covering said first oxidation layer in said opening comprises:
conformally forming said first silicon layer; and
performing a chemical mechanical polishing to remove said first silicon layer on said hard mask so that said first silicon layer covers said first oxidation layer.
5. The method of claim 1 , wherein said first silicon layer comprises amorphous silicon.
6. The method of claim 1 , wherein said first silicon layer comprises poly-silicon.
7. The method of claim 1 , wherein said first silicon layer has a thickness of about 50 Å-400 Å.
8. The method of claim 1 , wherein said hard mask is removed by hot phosphoric acid.
9. The method of claim 1 , before removing said hard mask further comprising:
performing a thermal process on said substrate.
10. The method of claim 1 , further comprising:
simultaneously removing said pad oxide layer and part of said first silicon layer to expose said substrate.
11. The method of claim 10 , wherein said pad oxide layer is removed by a fluoro-containing etchant.
12. The method of claim 10 , after removing said pad oxide layer further comprising:
forming a gate oxide layer disposed on said exposed substrate.
13. The method of claim 12 , wherein said gate oxide layer is formed by a thermal oxidation.
14. The method of claim 1 , further comprising:
forming a gate disposed on said first oxide layer.
15. The method of claim 14 , wherein said first silicon layer is entirely transformed into a second oxidation layer combined with said first oxidation layer.
16. The method of claim 1 , wherein said shallow trench isolation is formed before said deep trench.
17. The method of claim 1 , further comprising a composite layer between said substrate and said Si in said deep trench.
18. The method of claim 1 , wherein said insulation structure serves as an insulation structure of a passing gate.
19. A method of forming an insulation structure, comprising:
providing a substrate comprising a deep trench filled with silicon and a shallow trench isolation adjacent to said deep trench, and sequentially forming on said substrate a patterned pad oxide layer and a patterned hard mask, wherein said patterned pad oxide layer and said patterned hard mask together define an opening of said deep trench;
performing an oxidation so that a first oxidation layer is formed on the surface of said silicon in said deep trench;
forming a first silicon layer covering said first oxidation layer in said opening; and
removing said hard mask, wherein said insulation structure serves as an insulation structure of a passing gate.
20. A method of forming an insulation structure, comprising:
providing a substrate comprising a deep trench filled with silicon and a shallow trench isolation within said substrate and adjacent to said deep trench, and sequentially forming on said substrate a patterned pad oxide layer and a patterned hard mask, wherein said patterned pad oxide layer and said patterned hard mask together define an opening of said deep trench;
performing an oxidation so that a first oxidation layer is formed on the surface of said silicon in said deep trench;
forming a first silicon layer covering said first oxidation layer in said opening; and
removing said hard mask.