Method of designing a probe card apparatus with desired compliance characteristics
View Patent ↗A probe card apparatus is configured to have a desired overall amount of compliance. The compliance of the probes of the probe card apparatus is determined, and an additional, predetermined amount of compliance is designed into the probe card apparatus so that the sum of the additional compliance and the compliance of the probes total the overall desired compliance of the probe card apparatus.
1. A method of making a probe card apparatus with a desired overall amount of compliance, said method comprising:
providing a plurality of probes;
determining an amount of compliance of said plurality of probes; and
providing in said probe card apparatus an additional amount of compliance,
wherein said desired overall amount of compliance is a sum of said additional amount of compliance and said compliance of said probes, wherein:
said amount of compliance of said probes corresponds to a first spring constant, which is a first ratio of force to deflection,
said additional amount of compliance corresponds to a second spring constant, which is a second ratio of force to deflection and
a given amount of force displaces said probes a distance that corresponds to a sum of said first spring constant and said second spring constant.
2. The method of claim 1 , wherein said second spring constant is greater than said first spring constant.
3. A method of testing an electronic device, said method comprising:
providing a probe card apparatus having a preselected amount of total compliance, said probe card apparatus comprising:
a plurality of probes, said plurality of probes having a first amount of compliance, and
compliance means for providing within said probe card apparatus a selected additional amount of compliance,
wherein said preselected amount of total compliance is a sum of said first amount of compliance and said selected additional amount of compliance;
bringing ones of said probes into contact with said electronic device; and
providing test signals to said electronic device through said probes, wherein:
said first amount of compliance corresponds to a first spring constant, which is a first ratio of force to deflection,
said additional amount of compliance corresponds to a second spring constant, which is a second ratio of force to deflection, and
a given amount of force displaces said probes a distance that corresponds to a sum of said first spring constant and said second spring constant.
4. The method of claim 3 , wherein said sum corresponds to an inverse of a mathematical addition of an inverse of said first spring constant and an inverse of said second spring constant.
5. An electronic device tested using the method of claim 4 .
6. The method of claim 3 , wherein said probe card apparatus further comprises:
a probe substrate to which said probes are attached;
an interface board comprising an interface for test signals, said probe substrate being connected to said interface board; and
a mounting mechanism configured to attach said probe card apparatus to a housing.
7. An electronic device tested using the method of claim 6 .
8. An electronic device tested using the method of claim 3 .