Carbon nanotube films, layers, fabrics, ribbons, elements and articles
View Patent ↗Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. To make various articles, certain embodiments provide a substrate. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. To make a nanofabric, a substrate is provided. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes wherein the non-woven fabric is substantially uniform density. The nanofabrics and articles have characteristics desirable for various electrical systems such as memory circuits and conductive traces and pads.
1. A structure for a nanotube switching device, comprising:
a substrate having a plurality of electrical contacts defined therein, the substrate having an upper surface; and
a non-woven nanotube fabric layer disposed over the upper surface of the substrate.
2. The structure of claim 1 , further comprising a photolithographic mask disposed over the nanotube fabric layer, defining a pattern thereon, wherein the photolithographic mask comprises a layer of photoresist disposed over the nanotube fabric layer.
3. The structure of claim 2 , wherein the layer of photoresist has been reacted using radiation.
4. The structure of claim 1 , wherein the nanotube fabric layer includes at least one of single-walled nanotubes and multi-walled nanotubes.
5. The structure of claim 1 , wherein the nanotube fabric layer includes at least one of metallic nanotubes and semiconducting nanotubes.
6. The structure of claim 1 , wherein the substrate includes at least one of a via and a plug.
7. The structure of claim 1 , wherein the substrate comprises defined regions of sacrificial material and defined support regions.
8. The structure of claim 7 , wherein the defined regions of sacrificial material form at least a portion of the upper surface of the substrate.
9. The structure of claim 8 , wherein the plurality of electrical contacts form at least a portion of the upper surface of the substrate and wherein regions of sacrificial material define a spacing between regions of the nanotube fabric layer and the electrical contacts.
10. The structure of claim 9 , wherein the nanotube fabric layer is partially suspended.
11. The structure of claim 1 , wherein the nanotube fabric layer comprises substantially a monolayer of nanotubes.
12. The structure of claim 1 , wherein the nanotube fabric layer comprises a multilayer of nanotubes.
13. The structure of claim 1 , wherein the nanotube fabric layer has a resistance of less than 1 kΩ/square.
14. The structure of claim 1 , wherein the nanotube fabric layer has a resistance of between 1-1000 kΩ/square.
15. The structure of claim 1 , wherein the nanotube fabric layer has a resistance of between 1-10 MΩ/square.
16. The structure of claim 1 , wherein the nanotube fabric layer comprises carbon nanotubes.
17. A structure for a nanotube switching device, comprising:
a substrate having a plurality of electrical contacts defined below an upper surface of the substrate; and
a patterned region of a non-woven nanotube fabric layer disposed above the upper surface of the substrate and electrically communicable with the plurality of electrical contacts.
18. The structure of claim 17 , wherein the patterned region of the non-woven nanotube fabric layer is at least partially suspended.
19. The structure of claim 17 , further comprising a photolithographic mask disposed over and substantially aligned with the patterned region of the non-woven nanotube fabric layer.
20. The structure of claim 17 , wherein the patterned region of the non-woven nanotube fabric layer comprises substantially a monolayer of nanotubes.
21. The structure of claim 17 , wherein the patterned region of the non-woven nanotube fabric layer comprises a multilayer of nanotubes.
22. The structure of claim 17 , wherein the non-woven nanotube fabric layer comprises carbon nanotubes.