IP Library Granted Patent US 7,876,457
Granted Patent B2
US 7,876,457 · App. 12/138,586 · Granted Jan 25, 2011

Laser metrology system and method

Assignee: Nikon Metrology NV
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Quick Facts
Patent No.
US 7,876,457
App. No.
12/138,586
Granted
Jan 25, 2011
Kind
B2
Abstract

A laser metrology system for determining a location of a target utilizes a laser projector having a laser source for projecting a laser beam. A rotating head directs the laser beam in a lateral direction. A sensor associated with the laser projector is capable of sensing the laser beam. A reflective target is configured to reflect the laser beam projector from the laser source toward the sensor in a manner indicative of the angle of the rotating head and the pulse of the laser beam to determine location of the target.

Claims (25)

1. A passive laser metrology system for determining a location of a target, comprising:

a laser projector having a laser source for projecting a laser beam and a rotating head directing the laser beam in a lateral direction,

a sensor means associated with said laser projector determining the mid-point between two laser pulses indicating the head angle and gap angle between two laser pulses;

a reflective target configured to reflect the laser beam projected from said laser source toward said sensor in a manner indicative of an angle of said rotating head and pulse of said laser beam thereby determining the location of the target; and

a computer receiving a signal from said sensor means determining the precise location of said target.

2. The laser metrology system set forth in claim 1 , wherein said laser projector houses said sensor.

3. The laser metrology system set forth in claim 1 , wherein said laser projector includes a cylindrical lens for generating a fan shaped laser beam capable of generating a reflective signal off said reflective target indicative of a three dimensional location of said reflective target.

4. The laser metrology system set forth in claim 1 , wherein said laser projector includes two cylindrical lenses for generating two fan shaped laser beams oriented at about 90 degrees and being capable of producing two a reflective signals off said reflective target indicative of a three dimensional location of said reflective target.

5. The laser metrology system set forth in claim 1 , wherein said reflective target is a retro-reflective sphere.

6. The laser metrology system set forth in claim 1 , wherein said laser projector includes a stationary mount disposed at a known location.

7. The laser metrology system set forth in claim 6 , wherein said minor and said lens rotates through 360 degrees at a substantially constant speed.

8. The laser metrology system set forth in claim 1 , wherein said laser projector includes a collimator and a mirror for directing the laser beam through a lens thereby generating the fan shaped laser beam.

9. The laser metrology system set forth in claim 1 , wherein said laser source projects said laser beam along a vertical axis through a collimator to a rotating mirror thereby redirecting said laser beam in a direction lateral to said vertical axis.

10. The laser metrology system set forth in claim 1 , wherein said projector includes a beam splitter for redirecting a signal received from said reflective target toward said sensor.

11. A passive laser metrology system for determining the position of a target, comprising:

a laser projector including a laser source and two cylindrical lenses for generating two fan-shaped beams oriented at about 90 degrees, sensor and rotating head directing transmitted laser beams laterally; and

a retro-reflective target reflecting said transmitted laser beams to said sensor indicative of a three-dimensional location of said target.

12. The laser metrology system as defined in claim 11 , wherein said retro-reflective target is a retro-reflective sphere.

13. The laser metrology system as defined in claim 11 , wherein said laser projector includes a stationary base at a predetermined known location including a laser, collimator and sensor, and a rotating head including a minor and said lenses which rotate through 360 degrees at a substantially constant speed.

14. The laser metrology system as defined in claim 11 , wherein said laser projects a transmitted laser beam upwardly in a vertical axis through a collimator to a rotating minor and said mirror reflects said laser beam generally horizontally.

15. A passive laser metrology system for determining a location of a target, comprising:

a laser projector having a laser source for projecting a laser beam and a rotating head including two cylindrical lenses directing the laser beam in a lateral direction for generating two fan-shaped laser beams oriented about 90 degrees,

a sensor associated with said laser projector and being capable of sensing the laser beams;

a reflective target configured to reflect projected beam from said laser source of a three-dimensional location of said target toward said sensor in a manner indicative of an angle of said rotating head and pulse of said laser beams, thereby determining the location of the target.

16. The laser metrology system set forth in claim 15 , wherein said sensor communicates with a computer programmed to determine said three-dimensional location of the target from a signal received from said sensor.

Assignments (3)
CHANGE OF NAME Recorded Nov 24, 2010
From: METRIS CANADA INC.
To: NIKON METROLOGY CANADA INC.
Reel/Frame 025418/0794 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 19, 2010
From: NIKON METROLOGY CANADA INC.
To: NIKON METROLOGY NV
Reel/Frame 025408/0783 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 8, 2008
From: RUEB, KURT D.
To: METRIS CANADA INC.
Reel/Frame 021361/0694 →
Continuity (2)
Provisional Application 6093433800 · Jun 13, 2007
Related Publication 20080309949A1 · Dec 18, 2008