Capacitor structure to enhance capacitive density and reduce equivalent series inductance

1. A capacitor comprising:

a dielectric material that is formed of anodic metal oxide and has a determinable thickness;

a pair of substantially or nearly comb-shaped surface electrodes that is formed on the same principal surface of the dielectric material, each surface electrode comprising a base portion and plural tooth portions connected to the base portion; and

plural substantially or nearly columnar internal electrodes whose one ends are connected to each tooth portion of the pair of surface electrodes, said internal electrodes extending in the thickness direction of the dielectric material and being enclosed by a part of the dielectric material including their other ends opposite to the one ends in their entirety except the one ends, wherein the pair of surface electrodes are disposed on the surface of the dielectric material so that the respective tooth portions thereof are arranged alternately and in parallel through the dielectric material.

2. The capacitor according to claim 1 , wherein the other ends of the internal electrodes are exposed to another principal surface of the dielectric material which is opposite to the surface on which the surface electrodes are formed, and an insulating layer is provided on the other principal surface of the dielectric material.

3. A capacitor comprising:

a dielectric material that is formed of anodic metal oxide and has a determinable thickness, said dielectric material having a pair of substantially or nearly comb-shaped recess patterns on a first principal surface and plural nanoholes extending solely through the dielectric material from the recess patterns in a thickness direction of the dielectric material, each comb-shaped recess pattern being constituted by a base portion and plural tooth portions extending from the base portion, wherein the tooth portions of the pair of comb-shaped recess patterns interlock without touching each other;

a pair of substantially or nearly comb-shaped surface electrodes that is formed in and along the comb-shaped recess patterns on the first principal surface of the dielectric material, said surface electrodes being insulated from each other; and

plural substantially or nearly columnar internal electrodes filling the nanoholes, wherein one ends of the internal electrodes are connected to each tooth portion of the pair of surface electrodes and the internal electrodes extend in the thickness direction of the dielectric material and are enclosed by a part of the dielectric material including their other ends opposite to the one ends in their entirety except the one ends.

4. The capacitor according to claim 3 , wherein the other ends of the internal electrodes are exposed to a second principal surface of the dielectric material which is opposite to the first principal surface on which the surface electrodes are formed, and an insulating layer is provided on the second principal surface of the dielectric material.

5. The capacitor according to claim 1 , wherein the internal electrodes have an aspect ratio of 10 to 10 4 .

6. The capacitor according to claim 1 , wherein the number of the tooth portions is 10 3 to 10 5 per 1 mm in length of the base portion.

7. The capacitor according to claim 1 , wherein the number of the internal electrodes is 10 6 to 10 10 per 1 mm in length of each tooth portion.