Perfluoroelastomer compositions and methods of preparing same
The present invention includes crosslinked perfluoroelastomeric compositions and molded articles formed from a cross-linkable perfluoroelastomeric composition having a first curable perfluoropolymer having a cure site monomer and a second perfluoropolymer having a cure site monomer. The molar ratio of the tetrafluoroethylene monomer to perfluoroalkylvinyl ether in one perfluoropolymer is about 0 to 100 to about 65 to 35 in the perfluoropolymer. The molar ratio of the tetrafluoroethylene monomer to the perfluoroalkylvinyl ether monomer in the second polymer is about 65:35 to about 95:5 in the second perfluoropolymer. The composition further includes a curative. One fluorine-containing elastomer composition herein, having a short crosslinking time, has perfluoroelastomers (A) having a tetrafluoroethylene unit, a perfluoralkylvinyl ether unit (a) and a monomer unit (b) having at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group, wherein the composition has two or more kinds of perfluoroelastomers (A) having differing contents of perfluoroalkylvinyl ether unit (a).
1. A fluorine-containing elastomer composition comprising
a first curable perfluoropolymer comprising tetrafluoroethylene, a first perfluoroalkylvinyl ether and at least one first cure site monomer having at least one functional group selected from the group consisting of nitrile, carboxyl and alkoxycarbonyl; and
a second curable perfluoropolymer comprising tetrafluoroethylene, a second perfluoroalkylvinyl ether and at least one second cure site monomer having at least one functional group selected from the group consisting of nitrile, carboxyl and alkoxycarbonyl, wherein a content of the first perfluoroalkylvinyl ether in the first curable perfluoropolymer and a content of the second perfluoroalkylvinyl ether in the second curable perfluoropolymer are different, and wherein a subtracted difference between the content of perfluoroalkylvinyl ether in the first curable perfluoropolymer and the content of the perfluoroalkylvinyl ether in the second curable perfluoropolymer is 5 to 25% by mole.
2. A sealing material for semiconductor manufacturing equipment made of the fluorine-containing elastomer composition of claim 1 .
3. The fluorine-containing elastomer composition of claim 1 , wherein the perfluoroalkylvinyl ether unit in at least one of the first curable perfluoropolymer and the second curable perfluoropolymer is a perfluoromethylvinyl ether unit.
4. The fluorine-containing elastomer composition of claim 1 , further comprising a crosslinking agent being crosslinkable with the at least one functional group of the first curable perfluoropolymer and the at least one functional group of the second curable perfluoropolymer.
5. The fluorine-containing elastomer composition of claim 4 , wherein the composition comprises from about 0.6 to about 0.9 weight percentage of the cross-linking agent.
6. A molded article made using the fluorine-containing elastomer composition of claim 1 .
7. The molded article of claim 6 , wherein the molded article is an O-ring, a seal or a gasket.
8. The molded article of claim 6 , wherein the molded article is bonded to a surface comprising a metal or a metal alloy.
9. The molded article of claim 6 , wherein the molded article is bonded to surface of a door for sealing a semiconductor-processing chamber.
10. A fluorine-containing elastomer composition comprising
perfluoroelastomers (A) having a tetrafluoroethylene unit, a perfluoroalkylvinyl ether unit (a) and a monomer unit (b) having at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group, wherein the composition comprises two or more kinds of perfluoroelastomers (A) having different contents of the perfluoroalkylvinyl ether unit (a), wherein in the two or more kinds of perfluoroelastomers (A), a subtracted difference in the content of perfluoroalkylvinyl ether unit (a) between any two kinds of perfluoroelastomers (A) is 5 to 25% by mole.
11. The fluorine-containing elastomer composition of claim 10 , wherein the monomer unit (b) is a nitrile group-containing monomer unit.
12. The fluorine-containing elastomer composition of claim 10 , wherein the perfluoroalkylvinyl ether unit (a) is a perfluoromethylvinyl ether unit.
13. The fluorine-containing elastomer composition of claim 10 , further comprising a crosslinking agent (B) being crosslinkable with at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group of the monomer unit (b).
14. The fluorine-containing elastomer composition of claim 13 , wherein an amount of the crosslinking agent (B) is 0.3 to 10.0 parts by mass based on 100 parts by mass of the whole perfluoroelastomers.
15. The fluorine-containing elastomer composition of claim 13 , wherein the crosslinking agent (B) is a compound containing at least two crosslinkable reaction groups represented by the formula (II):
wherein R 1 groups are the same or different and each is —NH 2 , —NHR 2 , —OH or —SH; R 2 is a monovalent organic group,
a compound represented by the formula (III):
wherein R 3 is —SO 2 —, —O—, —CO—, an alkylene group having to 6 carbon atoms, a perfluoroalkylene group having 1 to 10 carbon atoms or a single bond; R 4 is
a compound represented by the formula (IV):
wherein R f 1 is a perfluoroalkylene group having 1 to 10 carbon atoms, and
a compound represented by the formula (V):
wherein n is an integer of 1 to 10.
16. The fluorine-containing elastomer composition of claim 13 , wherein the composition comprises from about 0.6 to about 0.9 weight percentage of the cross-linking agent.