Methods of manufacturing an oxide semiconductor thin film transistor
Methods of manufacturing an oxide semiconductor thin film transistor are provided. The methods include forming a gate on a substrate, and a gate insulating layer on the substrate to cover the gate. A channel layer, which is formed of an oxide semiconductor, may be formed on the gate insulating layer. Source and drain electrodes may be formed on opposing sides of the channel layer. The method includes forming supplying oxygen to the channel layer, forming a passivation layer to cover the source and drain electrodes and the channel layer, and performing an annealing process after forming the passivation layer.
1. A method of manufacturing an oxide semiconductor thin film transistor, the method comprising:
forming a gate on a substrate;
forming a gate insulating layer on the substrate such that the gate insulating layer covers the gate;
forming a channel layer on the gate insulating layer, the channel layer being formed of an oxide semiconductor;
forming source and drain electrodes on opposing sides of the channel layer;
forming a passivation layer that covers the source and drain electrodes and the channel layer;
injecting a plurality of oxygen-containing ions into the channel layer after forming the passivation layer; and
annealing the oxide semiconductor thin film transistor after forming the passivation layer and injecting the oxygen-containing ions.
2. The method of claim 1 , wherein the oxide semiconductor is an oxide compound selected from the group consisting of zinc oxide, tin oxide, Ga—In—Zn oxide, In—Zn oxide, In—Sn oxide and combinations thereof.
3. The method of claim 2 , wherein the oxide compound is doped with at least one selected from the group consisting of aluminum (Al), nickel (Ni), copper (Cu), tantalum (Ta), hafnium (Hf), titanium (Ti) and combinations thereof.
4. The method of claim 1 , wherein the oxygen-containing ions are injected through the passivation layer using an ion injection apparatus.
5. The method of claim 4 , wherein injecting the oxygen-containing ions substantially increases a density of the oxygen-containing ions between the passivation layer and the channel layer.
6. The method of claim 1 , wherein injecting the oxygen-containing ions substantially increases a density of the oxygen-containing ions between the passivation layer and the channel layer.
7. The method of claim 1 , wherein the passivation layer is at least one selected from the group consisting of a silicon oxide layer, a silicon nitride layer and an organic insulating layer.
8. The method of claim 1 , wherein annealing is performed at a temperature of approximately 150° C.-500° C.
9. The method of claim 8 , wherein annealing is performed at a temperature of approximately 150° C.-400° C.