Microelectronic package with self-heating interconnect
View Patent ↗A microelectronic package is provided. The microelectronic package includes a substrate having a plurality of solder bumps disposed on a top side of the substrate and a die disposed adjacent to the top side of the substrate. The die includes a plurality of glassy metal bumps disposed on a bottom side of the die wherein the plurality of glassy metal bumps are to melt the plurality of solder bumps to form a liquid solder layer. The liquid solder layer is to attach the die with the substrate.
1. A method of forming a microelectronic package, comprising:
providing a substrate having a plurality of solder bumps on a top side of the substrate;
disposing a die adjacent to the top side of the substrate;
forming a plurality of glassy metal bumps on a bottom side of the die, wherein each of the plurality of glassy metal bumps is to contact with a corresponding solder bump on the substrate;
crystallizing the plurality of glassy metal bumps to melt the plurality of solder bumps and form a liquid solder layer, wherein the liquid solder layer attaches the die with the substrate.
2. The method of claim 1 , further comprising attaching the die to the substrate at a pre-determined temperature to crystallize the plurality of glassy metal bumps.
3. The method of claim 2 , wherein the pre-determined temperature is greater than a glass transition temperature of the plurality of glassy metal bumps.
4. The method of claim 1 , further comprising disposing an insulating layer between adjacent glassy metal bumps.
5. The method of claim 4 , further comprising disposing a wettable metal on each of the plurality of glassy metal bumps.
6. The method of claim 5 , further comprising disposing a noble metal on the wettable metal.
7. A method of forming a microelectronic package, comprising:
forming a plurality of glassy metal bumps on a bottom side of a die;
disposing the die adjacent to the top side of a substrate, wherein the a substrate includes a plurality of solder bumps on a top side thereof;
contacting the plurality of glassy metal bumps to the plurality of solder bumps; and
crystallizing the plurality of glassy metal bumps to melt the plurality of solder bumps and form a liquid solder layer, wherein the liquid solder layer attaches the die with the substrate.
8. The method of claim 7 , wherein forming the plurality of glassy metal bumps includes chemical-mechanical polishing of a glassy metal layer that is imprinted over a patterned insulation layer.
9. The method of claim 7 , further including:
photoresist patterning and etching an insulation layer to form a patterned insulation layer;
chemical-mechanical polishing of a glassy metal layer that is imprinted over the patterned insulation layer to form the plurality of glassy metal bumps.
10. The method of claim 7 , further comprising attaching the die to the substrate at a pre-determined temperature to crystallize the plurality of glassy metal bumps.
11. The method of claim 10 , wherein the pre-determined temperature is greater than a glass transition temperature of the plurality of glassy metal bumps.
12. The method of claim 7 , further comprising disposing an insulating layer between adjacent glassy metal bumps.
13. The method of claim 12 , further comprising disposing a wettable metal on each of the plurality of glassy metal bumps.
14. The method of claim 13 , further comprising disposing a noble metal on the wettable metal.
15. The method of claim 7 , wherein forming the plurality of glassy metal bumps includes forming a layer of Au 49.2 Cu 27 Ag 5.5 Pd 2.35 Si 16 .
16. The method of claim 7 , wherein forming the plurality of glassy metal bumps includes forming a layer of Au 49.2 Cu 27 Ag 5.5 Pd 2.35 Si 16 , the method further including disposing a copper wettable metal on each of the plurality of glassy metal bumps.
17. A method of forming a microelectronic package, comprising:
imprinting a glassy metal layer upon a die under pressure to cause superplastic deformation and to fill a pattern that results in a plurality of glassy metal bumps on a bottom side of the die;
disposing the die adjacent to the top side of a substrate, wherein the substrate includes a plurality of solder bumps on a top side thereof;
contacting the plurality of glassy metal bumps to the plurality of solder bumps; and
crystallizing the plurality of glassy metal bumps to melt the plurality of solder bumps and form a liquid solder layer, wherein the liquid solder layer attaches the die with the substrate.
18. The method of claim 17 , further comprising disposing a wettable metal on each of the plurality of glassy metal bumps.
19. The method of claim 18 , further comprising disposing a noble metal on the wettable metal.
20. The method of claim 17 , wherein the plurality of glassy metal bumps includes Au 49.2 Cu 27 Ag 5.5 Pd 2.35 Si 16 .
21. The method of claim 17 , wherein the plurality of glassy metal bumps includes Mg 54 Cu 28 Ag 7 Y 11 .
22. The method of claim 17 , wherein the plurality of glassy metal bumps includes La 57.6 Al 17.5 Cu 12.45 Ni 12.45 .
23. The method of claim 17 , wherein the plurality of glassy metal bumps includes Au 49.2 Cu 27 Ag 5.5 Pd 2.35 Si 16 , the method further including disposing a copper wettable metal on each of the plurality of glassy metal bumps.