Display panel and method of manufacturing the same
A display panel according to the present invention includes: a common wiring ( 4 ) formed above a TFT array substrate ( 30 ) and having a first terminal ( 5 ); a first transparent conductive film ( 6 ) formed above the common wiring ( 4 ); an interlayer insulating film ( 15 ) formed above the first transparent conductive film ( 6 ) and having a first terminal portion contact hole ( 17 ) formed outside a display area ( 54 ) and inside a sealing material ( 50 ); and a terminal pad ( 20 ) formed above the interlayer insulating film ( 15 ) and electrically connected to the common wiring ( 4 ) through the first transparent conductive film ( 6 ) in the first terminal portion contact hole ( 17 ).
1. A display panel including a first substrate and a second substrate that are bonded together through a sealing material, the display panel comprising:
a first metal thin film formed above the first substrate and having a terminal;
a protective transparent conductive film formed above the first metal thin film;
an insulating film formed above the protective transparent conductive film and having a contact hole formed outside a display area and inside the sealing material; and
a transparent conductive film formed above the insulating film and electrically connected to the first metal thin film through the protective transparent conductive film in the contact hole.
2. The display panel according to claim 1 , further comprising:
a second metal thin film formed above the first metal thin film and formed below the transparent conductive film; and
a layer conversion portion having the contact hole formed therein,
wherein at the layer conversion portion the first metal thin film and the second metal thin film, which are formed in different layers, are electrically connected to each other through the transparent conductive film.
3. The display panel according to claim 2 , further comprising a circuit formed outside the display area to supply a signal to wiring of the display area,
wherein the layer conversion portion is formed in the circuit.
4. The display panel according to claim 1 , wherein the protective transparent conductive film comprises one of an ITO film containing an indium oxide and a tin oxide, and an IZO film containing an indium oxide and a zinc oxide.
5. The display panel according to claim 2 , wherein the protective transparent conductive film comprises one of an ITO film containing an indium oxide and a tin oxide, and an IZO film containing an indium oxide and a zinc oxide.
6. The display panel according to claim 3 , wherein the protective transparent conductive film comprises one of an ITO film containing an indium oxide and a tin oxide, and an IZO film containing an indium oxide and a zinc oxide.
7. A method of manufacturing a display panel, the display panel including a first substrate and a second substrate that are bonded together through a sealing material, the method comprising the steps of:
forming, above the first substrate, a metal thin film having a terminal;
forming a protective transparent conductive film above the metal thin film;
forming, above the protective transparent conductive film, an insulating film having a contact hole formed outside a display area and inside the sealing material; and
forming, above the insulating film, a transparent conductive film electrically connected to the metal thin film through the protective transparent conductive film in the contact hole.
8. The method of manufacturing a display panel according to claim 7 , wherein:
the step of forming the protective transparent conductive film comprises forming the protective transparent conductive film in an amorphous state; and
the step of forming the insulating film comprises crystallizing the protective transparent conductive film at a substrate heating temperature obtained when the insulating film is formed.
9. The method of manufacturing a display panel according to claim 7 , wherein the protective transparent conductive film comprises one of an ITO film containing an indium oxide and a tin oxide, and an IZO film containing an indium oxide and a zinc oxide.
10. The method of manufacturing a display panel according to claim 8 , wherein the protective transparent conductive film comprises one of an ITO film containing an indium oxide and a tin oxide, and an IZO film containing an indium oxide and a zinc oxide.
11. The method of manufacturing a display panel according to claim 7 , wherein the step of forming the protective transparent conductive film comprises wet etching the protective transparent conductive film and the metal thin film at the same time by use of a mild acidic etchant.
12. The method of manufacturing a display panel according to claim 8 , wherein the step of forming the protective transparent conductive film comprises wet etching the protective transparent conductive film and the metal thin film at the same time by use of a mild acidic etchant.
13. The method of manufacturing a display panel according to claim 9 , wherein the step of forming the protective transparent conductive film comprises wet etching the protective transparent conductive film and the metal thin film at the same time by use of a mild acidic etchant.
14. The method of manufacturing a display panel according to claim 7 , wherein the step of forming the transparent conductive film comprises wet etching the transparent conductive film by use of an etchant mainly made of oxalic acid.
15. The method of manufacturing a display panel according to claim 8 , wherein the step of forming the transparent conductive film comprises wet etching the transparent conductive film by use of an etchant mainly made of oxalic acid.
16. The method of manufacturing a display panel according to claim 9 , wherein the step of forming the transparent conductive film comprises wet etching the transparent conductive film by use of an etchant mainly made of oxalic acid.