Semiconductor device and method of manufacturing semiconductor device
View Patent ↗According to an aspect of an embodiment, a semiconductor device has a semiconductor substrate, a gate insulating film on the semiconductor substrate, a gate electrode formed on the gate insulating film, an impurity diffusion region formed in an area of the semiconductor substrate adjacent to the gate electrode to a first depth to the semiconductor substrate, the impurity diffusion region containing impurity, an inert substance containing region formed in the area of the semiconductor substrate to a second depth deeper than the first depth, the inert substance containing region containing an inert substance, and a diffusion suppressing region formed in the area of the semiconductor substrate to a third depth deeper than the second depth, the diffusion suppressing region containing a diffusion suppressing substance suppressing diffusion of the impurity.
1. A method of manufacturing a semiconductor device comprising:
forming a gate electrode over a gate insulating film disposed over a semiconductor substrate;
forming an amorphous region in an area of the semiconductor substrate adjacent to the gate electrode to a first depth;
forming a diffusion suppressing region in the area of the semiconductor substrate to a second depth deeper than the first depth, the diffusion suppressing region containing a diffusion suppressing substance suppressing diffusion of a impurity;
forming an impurity diffusion region in the area of the semiconductor substrate to a third depth shallower than the first depth, the impurity diffusion region containing the impurity; and
annealing the semiconductor substrate.
2. The method according to claim 1 , wherein the amorphous region is formed by doping the inert substance.
3. The method according to claim 2 , wherein the semiconductor substrate comprises a body of single crystal silicon and the inert substance is a substance heavier than silicon.
4. The method according to claim 3 , wherein the inert substance is germanium.
5. The method according to claim 1 , wherein the diffusion suppressing substance is carbon.
6. The method according to claim 1 , wherein the impurity is at least one of phosphorous, arsenic, boron, boron fluoride and cluster boron.