X-ray tube and X-ray analysis apparatus
View Patent ↗A vacuumed enclosure has a window formed of an X-ray transmissive material. The vacuumed enclosure encloses an electron beam source for generating an electron beam and a target which, irradiated by the electron beam, generates a primary X-ray. The target is smaller in the outer dimension than the window and located on the center of the window such that it irradiates, through the window, the primary X-ray onto a sample located outside. The vacuumed enclosure further encloses an X-ray detector located such that it can detect a fluorescent X-ray and a scattered X-ray coming from the sample through the window. The X-ray detector generates a signal representative of energy information of the fluorescent X-ray and the scattered X-ray. The vacuumed enclosure further encloses a thermally and electrically conductive metal extending through the target across the widow.
1. An X-ray tube comprising:
a vacuum enclosure having a vacuum inside and a window made of an X-ray transmissive film through which X-rays are transmitted;
an electron beam source mounted inside the vacuum enclosure and emitting an electron beam;
a target mounted over the window and irradiated with the electron beam to thereby produce primary X-rays which are ejected at an external sample through the window, the target being smaller in outside diameter than the window;
an X-ray detector device disposed inside the vacuum enclosure and acting to detect fluorescent X-rays and scattering X-rays entering from the window after being released from the sample and to output a signal carrying information about energies of the fluorescent X-rays and scattering X-rays; and
a metallic thermal and electrical conductor portion mounted over a part of the window and extending from the target to the vacuum enclosure.
2. The X-ray tube set forth in claim 1 , wherein said thermal and electrical conductor portion is made of the same material as the target and located over the window.
3. The X-ray tube set forth in claim 2 , wherein said thermal and electrical conductor portion is made thicker than the target.
4. An X-ray analysis apparatus comprising:
an X-ray tube as set forth in claim 1 ;
an analyzer for analyzing said signal; and
a display portion for displaying results of analysis performed by the analyzer.
5. The X-ray analysis apparatus set forth in claim 4 , wherein said analyzer and said display portion are mounted in the vacuum enclosure.