X-ray tube and X-ray analysis apparatus
View Patent ↗Provided are an X-ray tube and an X-ray analysis apparatus, which can be further reduced in size as well as in weight and more efficiently detect a fluorescent X-ray and the like to increase sensitivity. The X-ray tube includes: a vacuum casing ( 2 ) having an interior in a vacuum state and a window section ( 1 ) formed of an X-ray transmission film through which an X-ray can be transmitted; an electron beam source ( 3 ) provided in the vacuum casing ( 2 ), to emit an electron beam (e); a target (T) provided in the vacuum casing ( 2 ) to be irradiated with the electron beam (e) to generate a primary X-ray and to be able to emit the generated primary X-ray through the window section ( 1 ) to an exterior sample (S); an X-ray detection element ( 4 ) provided in the vacuum casing ( 2 ) to be able to detect a fluorescent X-ray and a scattered X-ray, which are emitted from the sample (S) to be incident through the window section ( 1 ), to output a signal containing energy information of the fluorescent X-ray and the scattered X-ray; and a metal guard member ( 10 ) provided between the X-ray detection element ( 4 ) and an irradiated area of the target (T) with the electron beam (e).
1. An X-ray tube comprising:
a vacuum casing including an interior in a vacuum state and a window section formed of an X-ray transmission film through which an X-ray is transmitted;
an electron beam source provided in the vacuum casing to emit an electron beam;
a target irradiated with the electron beam to generate a primary X-ray and to emit the generated primary X-ray through the window section to an exterior sample, the target being provided on the window section and having an outer diameter smaller than that of the window section;
an X-ray detection element provided in the vacuum casing to detect a fluorescent X-ray and a scattered X-ray, the fluorescent X-ray and the scattered X-ray being emitted from the sample to be incident through the window section, to output a signal containing energy information of the fluorescent X-ray and the scattered X-ray; and
a guard part provided between the X-ray detection element and an irradiated area of the target with the electron beam.
2. An X-ray tube according to claim 1 , wherein the guard part is made of a metal and is set at one of a ground potential and a positive potential.
3. An X-ray tube according to claim 1 , wherein the guard part is a guard member made of a metal provided between the X-ray detection element and the target.
4. An X-ray tube according to claim 1 , wherein the target includes a target main body corresponding to the irradiated area and a protruding wall part protruding from the target main body between the target main body and the X-ray detection element to serve as the guard part.
5. An X-ray analysis apparatus comprising:
the X-ray tube according to claim 1 ;
an analyzer for analyzing the signal; and
a display section for displaying a result of analysis of the analyzer.
6. An X-ray analysis apparatus according to claim 5 , wherein the analyzer and the display section are provided in the vacuum casing to make the X-ray analysis apparatus portable.