Forming separation directives using a printing feasibility analysis
View Patent ↗Separation directives for integrated circuit layout design data are formed based upon one or more printing feasibility analyses performed on the layout design data. At least one printing feasibility analysis is performed on layout design data to identify portions of the design that may not be correctly formed or “printed” during a photolithographic process. The geometric element edges involved in a potential printing defect are then identified as edges to be formed using separate masks. Further, separation directives may be created to specifically designate the identified edges as edges to be formed using separate masks in a photolithographic manufacturing process.
1. A method of generating separation directives for segmenting circuit layout design data, comprising:
employing a computer to
analyze potential manufacturing defects identified in a printing feasibility analysis performed on circuit layout design data, and
based upon the potential manufacturing defects, identify separated edges in the layout design data that should be formed using separate masks in a lithographic manufacturing process; and
employing a computer to create separation directives designating the separated edges as edges that should be formed using separate masks in a lithographic manufacturing process.
2. The method recited in claim 1 , further comprising modifying the circuit layout design data to include the separation directives.
3. The method recited in claim 1 , further comprising performing the printing feasibility analysis on the circuit layout design data to identify the potential manufacturing defects.
4. The method recited in claim 1 , wherein the potential manufacturing defects include bridging defects and pinching defects.
5. The method recited in claim 1 , further comprising storing the separation directives in an electronic data storage medium.
6. The method recited in claim 1 , wherein the separation directives include a separation directive with a polygon abutting the separated edges designated by the separation directive.
7. The method recited in claim 1 , wherein the separation directives include a separation directive with one or more virtual edges orthogonal to the separated edges designated by the separation directive.
8. The method recited in claim 1 , wherein employing a computer to create the separation directives further includes:
analyzing the layout design data to determine if any of the separated edges are associated with prohibition information indicating that the separated edges should not be formed using separate masks in a lithographic manufacturing process; and
creating separation directives designating only the separated edges that are not associated with prohibition information.
9. The method recited in claim 1 , further comprising identifying the separated edges based upon potential manufacturing defects having a threshold likelihood of occurring in a lithographic manufacturing process.
10. The method recited in claim 1 , further comprising employing a computer to:
analyze potential manufacturing defects identified in a second printing feasibility analysis performed on the circuit layout design data, and
based upon the potential manufacturing defects identified in the second printing feasibility analysis, identify separated edges in the layout design data that should be formed using separate masks in a lithographic manufacturing process.
11. The method recited in claim 1 , further comprising partitioning the circuit layout design data using the created separation directives.
12. An edge separation tool, comprising:
a separated edge identification module configured to
analyze potential manufacturing defects identified in a printing feasibility analysis performed on circuit layout design data, and
based upon the potential manufacturing defects, identify separated edges in the layout design data that should be formed using separate masks in a lithographic manufacturing process; and
a separation directive creation module configured to create separation directives designating the separated edges as edges that should be formed using separate masks in a lithographic manufacturing process.
13. The edge separation tool recited in claim 12 , further comprising a printing feasibility analysis module configured to perform the printing feasibility analysis on the circuit layout design data to identify the potential manufacturing defects.
14. The edge separation tool recited in claim 13 , wherein the printing feasibility analysis module is configured to identify potential manufacturing defects include bridging defects and pinching defects.
15. The edge separation tool recited in claim 12 , wherein the separation directive creation module is further configured to modify the circuit layout design data to include the separation directives.
16. The edge separation tool recited in claim 12 , wherein the separation directive creation module is further configured to store the separation directives in an electronic data storage medium.
17. The edge separation tool recited in claim 12 , wherein the separation directive creation module is configured to generate a separation directive with a polygon abutting the separated edges designated by the separation directive.
18. The edge separation tool recited in claim 12 , wherein the separation directive creation module is configured to generate a separation directive with one or more virtual edges orthogonal to the separated edges designated by the separation directive.
19. The edge separation tool recited in claim 12 , wherein the separation directive creation module is configured to create separation directives designating only separated edges that are not associated with prohibition information indicating that the edges should not be formed using separate masks in a lithographic manufacturing process.
20. One or more computer-readable media devices having stored thereon computer executable instructions for causing a computer to perform the method, comprising:
analyzing potential manufacturing defects identified in a printing feasibility analysis performed on circuit layout design data;
based upon the potential manufacturing defects, identifying separated edges in the layout design data that should be formed using separate masks in a lithographic manufacturing process; and
creating separation directives designating the separated edges as edges that should be formed using separate masks in a lithographic manufacturing process.
21. The one or more computer-readable media devices recited in claim 20 , wherein the method further comprises performing the printing feasibility analysis on the circuit layout design data to identify the potential manufacturing defects.
22. The one or more computer-readable media devices recited in claim 20 , wherein the method further comprises modifying the circuit layout design data to include the separation directives.
23. The one or more computer-readable media devices recited in claim 20 , wherein the method further comprises storing the separation directives in an electronic data storage medium.
24. The one or more computer-readable media devices recited in claim 20 , wherein the method further comprises creating separation directives that include at least one separation directive with a polygon abutting the separated edges designated by the at least one separation directive.
25. The one or more computer-readable devices media recited in claim 20 , wherein the method further comprises creating separation directives that include at least one separation directive with one or more virtual edges orthogonal to the separated edges designated by the at least one separation directive.
26. The one or more computer-readable media devices recited in claim 20 , wherein the computer-executable instructions for creating the separation directives includes computer executable instructions for:
analyzing the layout design data to determine if any of the separated edges are associated with prohibition information indicating that the separated edges should not be formed using separate masks in a lithographic manufacturing process; and
creating separation directives designating only the separated edges that are not associated with prohibition information.
27. The one or more computer-readable media devices recited in claim 20 , wherein the computer-executable instructions for identifying the separated edges include computer executable instructions for identifying the separated edges based upon potential manufacturing defects having a threshold likelihood of occurring in a lithographic manufacturing process.