IP Library Granted Patent US 7,948,082
Granted Patent B2
US 7,948,082 · App. 12/195,675 · Granted May 24, 2011

Method of fabricating a patterned nanoscopic article

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Quick Facts
Patent No.
US 7,948,082
App. No.
12/195,675
Granted
May 24, 2011
Kind
B2
Abstract

Nanowire articles and methods of making the same are disclosed. A conductive article includes a plurality of inter-contacting nanowire segments that define a plurality of conductive pathways along the article. The nanowire segments may be semiconducting nanowires, metallic nanowires, nanotubes, single walled carbon nanotubes, multi-walled carbon nanotubes, or nanowires entangled with nanotubes. The various segments may have different lengths and may include segments having a length shorter than the length of the article. A strapping material may be positioned to contact a portion of the plurality of nanowire segments. The strapping material may be patterned to create the shape of a frame with an opening that exposes an area of the nanowire fabric. Such a strapping layer may also be used for making electrical contact to the nanowire fabric especially for electrical stitching to lower the overall resistance of the fabric.

Claims (37)

1. A conductive article comprising:

a plurality of inter-contacting carbon nanomaterial fibers defining a plurality of conductive pathways; and

a lithographically-patterned thin metal layer that is positioned to contact a portion of the plurality of inter-contacting carbon nanomaterial fibers.

2. The article of claim 1 , wherein the plurality of carbon nanomaterial fibers include nanowire segments.

3. The article of claim 2 , wherein the nanowire segments include at least one of metallic nanowire segments and semiconducting nanowire segments.

4. The article of claim 2 , wherein the plurality of nanowire segments have different lengths.

5. The article of claim 2 , wherein the plurality of nanowire segments include segments having a length shorter than the length of the article.

6. The article of claim 1 , wherein the plurality of carbon nanomaterial fibers include nanotube segments.

7. The article of claim 6 , wherein the nanotube segments include single-walled carbon nanotubes.

8. The article of claim 6 , wherein the nanotube segments include multi-walled carbon nanotubes.

9. The article of claim 1 , wherein the plurality of carbon nanomaterial fibers include nanowire segments entangled with nanotube segments.

10. The article of claim 1 , further comprising semiconducting nanomaterials interposed in porous regions among the plurality of inter-contacting carbon nanomaterial fibers.

11. The article of claim 1 , further comprising metallic nanomaterials interposed in porous regions among the plurality of inter-contacting carbon nanomaterial fibers.

12. The article of claim 1 , further comprising insulating nanomaterials interposed in porous regions among the plurality of inter-contacting carbon nanomaterial fibers.

13. The article of claim 1 , further comprising support nanomaterials interposed in porous regions among the plurality of inter-contacting carbon nanomaterial fibers, the support materials including at least one of: carbon, silicon dioxide, silicon nitride, silicon, aluminum, tungsten, titanium, copper, gold, silver, and molybdenum.

14. The article of claim 1 , wherein the thin metal layer contacts the periphery of the plurality of inter-contacting carbon nanomaterial fibers.

15. The article of claim 1 , wherein the thin metal layer is lithographically patterned in the shape of a frame with an opening that exposes an area of the plurality of inter-contacting nanowire segments.

16. The article of claim 1 , wherein the article is disposed on a substrate.

17. The article of claim 1 , wherein the thin metal layer is vertically aligned with the plurality of inter-contacting carbon nanomaterial fibers.

18. A conductive article comprising:

a defined pattern of nanomaterials, the nanomaterials including a mixture of carbon fibers forming a network having a resistance; and

a lithographically patterned thin metal layer that is positioned to contact a portion of the defined pattern of nanomaterials;

wherein the conductive article is constructed and arranged such that the resistance of the defined pattern of nanomaterials is selectively controlled.

19. The article of claim 18 , wherein the carbon fibers included nanotubes.

20. The article of claim 18 , wherein the carbon fibers include nanowires.

21. The article of claim 20 , wherein the nanowires include metallic nanowires.

22. The article of claim 20 , wherein the nanowires include semiconducting nanowires.

23. The article of claim 18 , wherein the carbon fibers are arranged in a network of a selected density to form a network having the selectively controlled resistance.

24. The article of claim 18 , wherein the thin metal layer contacts the periphery of the defined pattern of nanomaterials.

25. The article of claim 18 , wherein the thin metal layer is lithographically patterned in the shape of a frame with an opening that exposes an area of nanomaterials.

26. The article of claim 18 , wherein the article is disposed on a substrate.

27. The article of claim 18 , wherein the thin metal layer is vertically aligned with the nanomaterials.

28. The article of claim 18 , wherein the adhesion energy of one or more surfaces of the thin metal layer positioned to contact a portion of the nanomaterials is controlled such that a resistance of the article is selectively controlled.

29. The article of claim 18 , wherein the mixture of carbon fibers forming the network is selected such that said resistance of the defined pattern of nanomaterials is selectively controlled.

30. The article of claim 18 , wherein the lithographically patterned thin metal layer is deposited overlying and at least partially through the portion of the defined pattern of nanomaterials.

31. The article of claim 30 , wherein the thin metal layer constructed and arranged to decrease the resistance of the defined pattern of nanomaterials.

32. The article of claim 18 , further comprising support nanomaterials interposed in porous regions among the mixture of carbon fibers forming the network, the support materials including at least one of: carbon, silicon dioxide, silicon nitride, silicon, aluminum, tungsten, titanium, copper, gold, silver, and molybdenum.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS Recorded Jul 8, 2021
From: SILICON VALLEY BANK
To: NANTERO, INC.
Reel/Frame 056790/0001 →
INTELLECTUAL PROPERTY SECURITY AGREEMENT Recorded Nov 11, 2020
From: NANTERO, INC.
To: SILICON VALLEY BANK
Reel/Frame 054383/0632 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 30, 2009
From: SEGAL, BRENT M.; RUECKES, THOMAS; BERTIN, CLAUDE L.
To: NANTERO, INC.
Reel/Frame 023025/0458 →