Inductor structure

1. An inductor structure, comprising:

a substrate;

a plurality of insulation layers on the substrate;

a first spiral conductive coil disposed in the insulation layers to form an inductor generating a magnetic field in a first direction; and

a second spiral conductive coil disposed in the insulation layers to form an inductor generating a magnetic field in a second direction;

wherein the first direction and the second direction are not parallel to each other, and a conductive section of the first spiral conductive coil and a conductive section of the second spiral conductive coil are disposed in a same one of the insulation layers and cross over to each other.

2. The inductor structure as claimed in claim, wherein the first spiral conductive coil has a plurality of first turns and each of the first turns comprises:

a first conductive section in a first insulation layer of the insulation layers;

a second conductive section in a second insulation layer of the insulation layers;

a third conductive section comprising a first group of via plugs formed in the insulation layers to connect a first end of the first conductive section and a first end of the second conductive section; and

a fourth conductive section comprising a second group of via plugs formed in the insulation layers to connect a second end of the second conductive section and a second end of the first conductive section of an adjacent another first turn.

3. The inductor structure as claimed in claim 2 , wherein the second spiral conductive coil has a plurality of second turns and each of the second turns comprises:

a fifth conductive section in a third insulation layer under the first insulation layer;

a sixth conductive section in a fourth insulation layer above the second insulation layer;

a seventh conductive section comprising a third group of via plugs formed in the insulation layers to connect a first end of the fifth conductive section and a first end of the sixth conductive section; and

an eighth conductive section comprising a fourth group of via plugs formed in the insulation layers to connect a second end of the sixth conductive section and a second end of the fifth conductive section of an adjacent another second turn.

4. The inductor structure as claimed in claim 2 , wherein the second spiral conductive coil has a plurality of third turns each disposed in an insulation layer, respectively, under the first insulation layer and above the second insulation layer, and two adjacent third turns connect each other through a via plug in the insulation layer.

5. The inductor structure as claimed in claim 3 , further comprising a third spiral conductive coil having a plurality of fourth turns each disposed in one of the insulation layers, respectively, beside, under, or above the first spiral conductive coil and the second spiral conductive coil, and two adjacent fourth turns connecting each other through a via plug in the insulation layer.

6. The inductor structure as claimed in claim 4 , further comprising a third spiral conductive coil disposed in the insulation layers beside, under, or above the first spiral conductive coil and the second spiral conductive coil, wherein the third spiral conductive coil has a plurality of fifth turns and each of the fifth turns comprises:

a fifth conductive section in a third insulation layer being one of the insulation layers, either the third insulation layer being the first insulation layer or being not the first insulation layer;

a sixth conductive section in a fourth insulation layer being another of the insulation layers, either the fourth insulation layer being the second insulation layer or being not the second insulation layer;

a seventh conductive section comprising a third group of via plugs formed in the third insulation layer, the fourth insulation layer, and the insulation layers therebetween to connect a first end of the fifth conductive section and a first end of the sixth conductive section; and

an eighth conductive section comprising a fourth group of via plugs formed in the third insulation layer, the fourth insulation layer, and the insulation layers therebetween to connect a second end of the sixth conductive section and a second end of the fifth conductive section of an adjacent another second turn.

7. The inductor structure as claimed in claim 1 , wherein the first direction is perpendicular to the second direction.

8. The inductor structure as claimed in claim 1 , further comprising a third spiral conductive coil disposed in the insulation layers to form an inductor generating a magnetic field in a third direction, wherein the third spiral conductive coil is disposed in the insulation layers beside, under, or above the first spiral conductive coil and the second spiral conductive coil.