Vacuum processing apparatus and vacuum processing method
View Patent ↗The invention provides a vacuum processing apparatus having a function for removing particles on the surface of the sample stage in order to improve the yield of the sample being processed. The vacuum processing apparatus comprises a processing chamber 104 disposed in a vacuum reactor and having plasma formed in the interior thereof, a sample stage 113 placed below the processing chamber 104 and having a sample 102 to be processed placed on the upper plane thereof for processing, and a gas introducing mechanism placed at an upper portion of the processing chamber 104 and having introduction holes for introducing processing gas into the processing chamber, wherein the sample stage 113 comprises grooves 117 and a gas supply port 119 for introducing thermal conductance gas 118 between the sample stage and the sample 102 to be processed, and a mechanism for introducing dust removal gas 120 through the gas supply port 119 between the sample stage 113 and the sample 102 to be processed or a dummy sample 202 having substantially the same shape as the sample to be processed placed on the sample stage 113 within the vacuum reactor, by which particles 201 attached to the sample stage 113 are removed via hydrodynamic force by the dust removal gas 120.
1. A vacuum processing apparatus comprising:
a processing chamber disposed inside a vacuum reactor and having plasma formed therein;
a sample stage arranged at a lower portion within the processing chamber and having a sample to be processed placed on an upper plane thereof;
a gas introduction mechanism positioned at an upper portion of the processing chamber and having introduction holes for introducing processing gas into the processing chamber;
a means for carrying a dummy sample onto the sample stage within the vacuum reactor and placing the dummy sample on the sample stage;
an electrostatic chuck means for fixing the sample to be processed on the sample stage;
a means for introducing a thermal conductance gas between the sample stage and the sample to be processed for controlling the temperature of the sample to be processed;
a means for introducing a dust removal gas between the sample stage and the dummy sample; and
a means for switching between introducing thermal conductance gas and introducing dust removal gas;
wherein a supply port for supplying the dust removal gas of the means for introducing the dust removal gas is also a supply port for supplying the thermal conductance gas of the means for introducing the thermal conductance gas.
2. The vacuum processing apparatus according to claim 1 , wherein
the electrostatic chuck means of the sample stage is a dipole system that operates even when plasma is not generated.
3. The vacuum processing apparatus according to claim 1 , wherein
the dummy sample placed on the sample stage has a protruded portion on the rear surface thereof, wherein when the protruded portion of the dummy sample is retained on the sample stage via electrostatic chuck, the protruded portion defines a flow path of dust removal gas introduced from the sample stage.
4. The vacuum processing apparatus according to claim 1 , wherein
the dummy sample has a pattern formed on a surface facing the sample stage that is reversed with respect to the pattern of the grooves formed to fill the thermal conductance gas between the sample to be processed and the sample stage, so that when dust removal gas is introduced between the dummy sample and the sample stage, the whole clearance between the dummy sample and the sample stage has the same conductance.