MEMS structure with metal protection rings
View Patent ↗A microelectromechanical system (MEMS) structure and a fabricating method thereof are described. The MEMS structure includes a fixed part and a movable part. The fixed part is disposed on and connects with a substrate. The movable part including at least two first metal layers, a first protection ring and a first dielectric layer is suspended on the substrate. The first protection ring connects two adjacent first metal layers, so as to define a first enclosed space between the two adjacent first metal layers. The first dielectric layer is disposed in the enclosed space and connects the two adjacent first metal layers.
1. A microelectromechanical system (MEMS) structure, comprising:
a fixed part, disposed on a substrate and connecting with the substrate; and
a movable part, suspended on the substrate and comprising:
at least two first metal layers;
a first protection ring, connecting two adjacent first metal layers, so as to define a first enclosed space between two adjacent metal layers; and
a first dielectric layer, disposed in the enclosed space and connecting two adjacent first metal layers.
2. The MEMS structure according to claim 1 , wherein the first protection ring substantially corresponds to a profile of each first metal layer.
3. The MEMS structure according to claim 1 , wherein the first protection ring comprises metal.
4. The MEMS structure according to claim 1 , wherein the fixed part comprises:
at least two second metal layers;
a second protection ring, connecting two adjacent second metal layers, so as to define a second enclosed space between two adjacent second metal layers; and
a second dielectric layer, disposed in the enclosed space and connecting two adjacent second metal layers.
5. The MEMS structure according to claim 4 , wherein the second protection ring substantially corresponds to a profile of each second metal layer.
6. The MEMS structure according to claim 4 , wherein the second protection ring comprises metal.
7. The MEMS structure according to claim 1 , further comprising a metal plug, so as to connect the fixed part and the substrate.
8. The MEMS structure according to claim 1 , wherein the MEMS structure comprises a cantilever beam, a bridge, or a membrane.
9. A microelectromechanical system (MEMS) structure, comprising:
a fixed part, disposed on a substrate; and
a suspended part, suspended on the substrate and comprising:
at least two first metal layers;
a first protection ring, connecting two adjacent first metal layers, so as to define a first enclosed space between two adjacent metal layers; and
a first dielectric layer, disposed in the enclosed space and connecting two adjacent first metal layers.
10. The MEMS structure according to claim 9 , wherein the first protection ring substantially corresponds to a profile of each first metal layer.
11. The MEMS structure according to claim 9 , wherein the first protection ring comprises metal.
12. The MEMS structure according to claim 9 , wherein the fixed part comprises:
at least two second metal layers;
a second protection ring, connecting two adjacent second metal layers, so as to define a second enclosed space between two adjacent second metal layers; and
a second dielectric layer, disposed in the enclosed space and connecting two adjacent second metal layers.
13. The MEMS structure according to claim 12 , wherein the second protection ring substantially corresponds to a profile of each second metal layer.
14. The MEMS structure according to claim 12 , wherein the second protection ring comprises metal.
15. The MEMS structure according to claim 9 , wherein the MEMS structure comprises a cantilever beam, a bridge, or a membrane.