In-situ chamber treatment and deposition process
Embodiments of the invention provide a method for treating the inner surfaces of a processing chamber and depositing a material on a during a vapor deposition process, such as atomic layer deposition (ALD) or by chemical vapor deposition (CVD). In one embodiment, the inner surfaces of the processing chamber and the substrate may be exposed to a reagent, such as a hydrogenated ligand compound during a pretreatment process. The hydrogenated ligand compound may be the same ligand as a free ligand formed from the metal-organic precursor used during the subsequent deposition process. The free ligand is usually formed by hydrogenation or thermolysis during the deposition process. In one example, the processing chamber and substrate are exposed to an alkylamine compound (e.g., dimethylamine) during the pretreatment process prior to conducting the vapor deposition process which utilizes a metal-organic chemical precursor having alkylamino ligands, such as pentakis(dimethylamino) tantalum (PDMAT).
1. A method for treating a chamber and depositing a material on a substrate surface, comprising:
exposing inner surfaces of a processing chamber and a substrate disposed within the processing chamber simultaneously to a treatment gas comprising a hydrogenated ligand compound during a pretreatment process, wherein the hydrogenated ligand compound has the chemical formula of HL, wherein the ligand L of the hydrogenated ligand compound is selected from the group consisting of cyclopentadienyl, alkylcyclopentadienyl, pentadienyl, pyrrolyl, isomers thereof, derivatives thereof, and combinations thereof and a coating of the hydrogenated ligand compound is formed on the inner surfaces of the processing chamber during the pretreatment process; and subsequently
exposing the substrate to a first precursor gas to deposit a material on the substrate within the processing chamber during a vapor deposition process, wherein the first precursor gas comprises a first precursor having the chemical formula of ML′ x , where x is 1, 2, 3, 4, 5, 6, or greater, M is an element selected from the group consisting of Ti, Zr, Hf, Nb, Ta, Mo, W, Ru, Co, Ni, Pd, Pt, Cu, Al, Ga, In, Si, Ge, Sn, P, As, and Sb, and each L′ is independently a ligand selected from the group consisting of alkylamino, alkylimino, alkoxy, alkyl, alkene, alkyne, cyclopentadienyl, alkylcyclopentadienyl, pentadienyl, pyrrolyl, hydrogen, halogen, isomers thereof, derivatives thereof, and combinations thereof.
2. The method of claim 1 , wherein the ligand L′ of the first precursor is selected from the group consisting of cyclopentadienyl, alkylcyclopentadienyl, pentadienyl, pyrrolyl, isomers thereof, derivatives thereof, and combinations thereof.