Metal gate transistor and method for fabricating the same
View Patent ↗A method for fabricating metal gate transistor is disclosed. First, a substrate having a first transistor region and a second transistor region is provided. Next, a stacked film is formed on the substrate, in which the stacked film includes at least one high-k dielectric layer and a first metal layer. The stacked film is patterned to form a plurality of gates in the first transistor region and the second transistor region, a dielectric layer is formed on the gates, and a portion of the dielectric layer is planarized until reaching the top of each gates. The first metal layer is removed from the gate of the second transistor region, and a second metal layer is formed over the surface of the dielectric layer and each gate for forming a plurality of metal gates in the first transistor region and the second transistor region.
1. A metal gate transistor, comprising:
a substrate having a first transistor region and a second transistor region;
a first metal gate disposed on the first transistor region, wherein the first metal gate further comprises:
a first high-k dielectric layer disposed on the bottom of the first metal gate;
a first metal layer disposed on the first high-k dielectric layer without extending upward for forming the sidewall of the first metal gate; and
a second metal layer disposed on the first metal layer and extending upward for forming the sidewall of the first metal gate, wherein the second metal layer is U-shaped.
2. The metal gate transistor of claim 1 , further comprising:
a second metal gate disposed on the second transistor region, comprising:
the first high-k dielectric layer disposed on the bottom of the second metal gate; and
the second metal layer disposed on the first high-k dielectric layer while extending upward for forming the sidewall of the second metal gate.
3. The metal gate transistor of claim 1 , further comprising a cap layer disposed between the first high-k dielectric layer and the first metal layer.
4. The metal gate transistor of claim 3 , wherein the cap layer comprises LaO or Dy 2 O 3 .
5. The metal gate transistor of claim 1 , further comprising a third metal layer disposed on the first metal layer and the second metal layer.
6. The metal gate transistor of claim 5 , wherein the third metal layer comprises Al, W, TiAl, or CoWP.