Nitride semiconductor light emitting device and method of manufacturing the same
View Patent ↗A nitride semiconductor light emitting device includes a light emitting structure having n-type and p-type nitride semiconductor layers and an active layer formed therebetween. N-type and p-type electrodes are electrically connected to the n-type and p-type nitride semiconductors, respectively. An n-type ohmic contact layer is formed between the n-type nitride semiconductor layer and the n-type electrode and has a first layer of a material In and a second layer formed on the first layer and of a material containing W. The nitride semiconductor light emitting device has thermal stability and excellent electrical characteristics without heat treatment.
1. A method of manufacturing a nitride semiconductor light emitting device, the method comprising:
sequentially stacking an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer to prepare a light emitting structure;
forming a first layer formed of In at one surface of the n-type nitride semiconductor layer and a second layer formed of a material containing W at the first layer to form an n-type ohmic contact layer;
forming an n-type electrode on the n-type ohmic contact layer; and
forming a p-type electrode to be electrically connected to the p-type nitride semiconductor layer, wherein
the forming an n-type electrode on the n-type ohmic contact layer is performed after forming the n-type ohmic contact layer without heat treatment of the n-type ohmic contact layer, and
the n-type ohmic contact layer is formed on a Ga-polar face of the n-type nitride semiconductor layer.
2. The method of claim 1 , wherein the forming a first layer is performed by sputtering.
3. The method of claim 1 , wherein the forming a second layer is performed by sputtering.
4. The method of claim 1 , wherein the first layer comprises a layer formed of a single material of In.