Group III nitride compound semiconductor device
View Patent ↗Disclosed is a group III nitride compound semiconductor device having a substrate, buffer layers on the substrate, and a group III nitride compound semiconductor layer on the top layer of the buffer layers. The buffer layers comprises a first buffer layer formed on the substrate and a second buffer layer formed on the first buffer layer. The first buffer layer is made of transition metal nitride, and the second buffer layer is made of nitride of gallium and a transition metal.
1. A group III nitride compound semiconductor device, comprising:
a substrate;
buffer layers disposed on the substrate;
and a group III nitride compound semiconductor layer disposed on the top layer of the buffer layers, the buffer layers comprising:
a first buffer layer disposed on the substrate, the first buffer layer comprising a transition metal nitride; and
a second buffer layer disposed on the first buffer layer, the second buffer layer comprising a nitride of gallium and a transition metal.
2. The group III nitride compound semiconductor device according to claim 1 , wherein said transition metal comprises at least one element selected from the group consisting of titanium, zirconium, hafnium, and tantalum.
3. The group III nitride compound semiconductor device according to claim 1 , wherein said buffer layers further comprise a third buffer layer interposed between the second buffer layer and the group III nitride compound semiconductor layer, the third buffer layer comprising GaN.
4. The group III nitride compound semiconductor device according to claim 1 , wherein said substrate comprises one selected from the group of sapphire, silicon carbide, gallium nitride, gallium phosphide, and gallium arsenide.
5. The group III nitride compound semiconductor device according to claim 1 , wherein said first buffer layer has a thickness of 20 to 100 Å.
6. The group III nitride compound semiconductor device according to claim 1 , wherein said second buffer layer has a thickness of 50 to 100 Å.
7. The group III nitride compound semiconductor device according to claim 1 , wherein said first buffer layer comprises TiN and said second buffer layer comprises (Ti, Ga)N.
8. The group III nitride compound semiconductor device according to claim 3 , wherein said third buffer layer has a thickness of 200 to 300 Å.
9. The group III nitride compound semiconductor device according to claim 3 , wherein said first buffer layer has a thickness of 20 to 100 Å, said second buffer layer has a thickness of 50 to 100 Å, and said third buffer layer has a thickness of 200 to 300 Å.
10. The group III nitride compound semiconductor device according to claim 9 , wherein said (Ti, Ga)N comprises a Ti 2 GaN phase.
11. A group III nitride compound semiconductor device comprising:
a substrate;
buffer layers disposed on the substrate;
and a group III nitride compound semiconductor layer disposed on the top layer of the buffer layers, the buffer layers comprising:
a first buffer layer disposed on the substrate, the first buffer layer comprising a transition metal nitride;
a second buffer layer disposed on the first buffer layer, the second buffer layer comprising a nitride of gallium and a transition metal; and
a third buffer layer interposed between the second buffer layer and the group III nitride compound semiconductor layer, the third buffer layer comprising GaN,
wherein the transition metal comprises at least on element selected from the group consisting of titanium, zirconium, hafnium, and tantalum.
12. The group III nitride compound semiconductor devise of claim 11 , wherein the first buffer layer has a thickness ranging from 20 Å to 100 Å, the second buffer layer has a thickness ranging 50 Å from 100 Å, and the third buffer layer has a thickness ranging from 200 Å to 300 Å.
13. The group III nitride compound semiconductor devise of claim 11 , wherein the first buffer layer comprises TiN, and the second buffer layer comprises (Ti, Ga)N.
14. The group III nitride compound semiconductor devise of claim 11 , wherein the first buffer layer comprises a TiN layer formed from one selected from the group of tetrakis-diethylamino-titanium, tetrakis-dimethylamino-titanium, titanium isopropoxide, and titanium tetrachloride.
15. The group III nitride compound semiconductor devise of claim 11 , wherein the second buffer layer comprises a (Ti, Ga)N layer formed from one selected from the group of tetrakis-diethylamino-titanium, tetrakis-dimethylamino-titanium, titanium isopropoxide, and titanium tetrachloride.
16. The group III nitride compound semiconductor devise of claim 11 , wherein the substrate comprises one selected from the group of sapphire, silicon carbide, gallium nitride, gallium phosphide, and gallium arsenide.
17. The group III nitride compound semiconductor devise of claim 11 , wherein the substrate comprises a hexagonal crystal structure.
18. The group III nitride compound semiconductor devise of claim 13 , wherein the (Ti, Ga)N comprises Ti 2 GaN phase.