Vertical semiconductor light-emitting device and method of manufacturing the same
View Patent ↗Provided is a vertical semiconductor light-emitting device and a method of manufacturing the same. The method may include sequentially forming a lower clad layer, an active layer, and an upper clad layer on a substrate to form a semiconductor layer and forming first electrode layers on the upper clad layer. A metal support layer may be formed on each of the first electrode layers and a trench may be formed between the first electrode layers. The substrate may be removed and a second electrode layer may be formed on the lower clad layer.
1. A method of manufacturing a vertical semiconductor light-emitting device, the method comprising:
sequentially forming a lower clad layer, an active layer, and an upper clad layer on a substrate to form a semiconductor layer;
forming a plurality of first electrode layers separated from each other on the upper clad layer;
forming metal support layers on each of the plurality of first electrode layers and forming a trench between the metal support layers by removing a portion of the lower clad layer, the active layer and the upper clad layer; and
removing the substrate and forming a second electrode layer on the lower clad layer,
wherein the trench has a width equal to a distance between two adjacent metal support layers from among the metal support layers.
2. The method of claim 1 , wherein the substrate is a sapphire substrate.
3. The method of claim 1 , wherein the lower clad layer and the upper clad layer include a nitrification gallium-based material.
4. The method of claim 1 , wherein the active layer is formed of multi quantum wall (MQW) structure of InGaN/GaN.
5. The method of claim 1 , wherein forming the metal support layers includes:
forming a seed layer on the upper clad layer and on a surface of each of the plurality of first electrode layers;
forming a photoresist (PR) layer on the seed layer between the plurality of first electrode layers;
forming metal support layers on the seed layer corresponding to each of the plurality of first electrode layers; and
removing the PR layer and forming a trench in a region from which the PR layer is removed.
6. The method of claim 5 , wherein the trench is formed using a reactive ion etching (RIE) process.
7. The method of claim 1 , wherein removing the substrate and the forming of the second electrode layer includes:
forming a filling layer including an adhesion material on the trench region and on the surface of each of the metal support layers;
attaching one of glass, silicon (Si) or sapphire onto the filling layer to form a bonding layer; and
removing the substrate.
8. The method of claim 7 , wherein the filling layer is formed of wax.
9. The method of claim 7 , wherein the filling layer is removed using acetone.
10. The method of claim 1 , wherein the substrate is separated from the lower clad layer by irradiating laser light having a wavelength less than about 370 nm.
11. The method of claim 7 , wherein the substrate is separated from the lower clad layer by irradiating laser light having a wavelength less than about 370 nm.
12. The method of claim 1 , wherein the second electrode layer is an n-type conductive material.
13. The method of claim 1 , wherein the metal support layers are formed using plasma vapor deposition (PVD) or chemical vapor deposition (CVD).