Color filter, optical sensor mounted with color filter, and method for manufacturing same
A color filter is manufactured on each of a plurality of light-receiving elements of an RGB sensor using a plurality of kinds of light-transmitting films having different transmission colors. In such a case, the light-transmitting film that is to be coated next does not uniformly spread across the entire semiconductor wafer, and coating nonuniformities readily occur when a pattern of the light-transmitting film formed earlier on a certain optical element has a right angle portion. In order to solve this problem, the pattern of the light-transmitting film formed earlier has a planar shape having corner-cut portions so that right angle portions do not occur.
1 . A color filter composed of a plurality of kinds of light-transmitting films formed on a substrate and provided with different transmission colors, the plurality of kinds of light-transmitting films being selectively disposed on each of a plurality of optical elements provided to the substrate, wherein:
the light-transmitting films disposed on the optical elements have a planar shape in which corner-cut portions are formed so that right angle portions are removed.
2 . The color filter of claim 1 , wherein:
an isolation region is formed between adjacent optical elements; and
the corner-cut portions are formed on the isolation region.
3 . An optical sensor mounted with the color filter according to claim 1 .
4 . An optical sensor mounted with the color filter according to claim 2 .
5 . A method for manufacturing a color filter composed of a plurality of kinds of light-transmitting films formed on a substrate and provided with different transmission colors, the plurality of kinds of light-transmitting films being selectively disposed on each of a plurality of optical elements provided to the substrate, the method for manufacturing a color filter comprising:
a light-transmitting film coating step for coating the light-transmitting film on the entire surface of the substrate; and
a patterning step for patterning the light-transmitting film coated on the substrate in a prescribed planar shape; and
the planar shape having corner-cut portions formed so that right angle portions are removed.
6 . The method for manufacturing a color filter of claim 5 , further comprising:
a step for forming an isolation region between adjacent optical elements, and
the light-transmitting film being patterned so that the corner-cut portions overlap the isolation region in the patterning step.