Semiconductor device and method for manufacturing same
A semiconductor device comprising a field effect transistor having higher breakdown voltage by reducing electric field concentration between the drain region and a gate electrode is provided. A semiconductor device includes, on a silicon substrate, an n-well source region and an n-well drain region, which are formed over a surface layer thereof to be spaced apart from each other; and a gate electrode provided via a gate insulating film, said gate insulating film being formed to extend over said source region and said drain region. Further, LOCOS oxide film 180 a is formed in the surface of the silicon substrate in the n-well drain region, and thus the LOCOS oxide film has a constricted portion in the cross sectional view, and the gate electrode is formed to extend across a constricted portion.
1 . A semiconductor device, comprising:
a source region and a drain region, formed over a semiconductor substrate to be spaced apart from each other;
a gate electrode provided via a gate insulating film, said gate insulating film being formed to extend over said source region and said drain region; and
a local oxidation of silicon (LOCOS) oxide film formed in a surface of said semiconductor substrate in said drain region,
wherein a constricted portion is provided in a cross section of said LOCOS oxide film, and said gate electrode is formed to extend across said constricted portion.
2 . The semiconductor device as set forth in claim 1 , wherein
said LOCOS oxide film has apexes in both ends thereof, and
said constricted portion is a section at the union of said apexes of said LOCOS oxide film.
3 . A method for manufacturing a semiconductor device, including:
preparing a semiconductor substrate having a source region and a drain region, formed over a surface layer thereof to be spaced apart from each other;
sequentially forming a sacrificial oxide film and a silicon nitride film over said semiconductor substrate;
patterning said silicon nitride film to form first and second openings for forming LOCOS oxide film over said sacrificial oxide film, said first and second openings for forming LOCOS oxide film being two-dimensionally adjacent to each other;
thermally oxidizing said semiconductor substrate to grow said sacrificial oxide film in said opening, thereby forming said LOCOS oxide film;
removing said silicon nitride film;
forming a gate insulating film over said semiconductor substrate so that said gate insulating film extend over said source region and said drain region; and
forming a gate electrode over said gate insulating film.