Semiconductor device manufacturing method and storage medium
An object of the present invention is to obtain a favorable etching shape in etching an organic film formed on a substrate. A semiconductor device manufacturing method according to the present invention comprises the steps of: etching with plasma a silicon-containing film and transferring a pattern of a pattern mask stacked on the silicon-containing film onto the silicon-containing film to form a patterned silicon-containing film; removing the pattern mask using plasma to expose the surface of the silicon-containing film; and etching the surface of the organic film through the patterned silicon-containing film by use of oxygen active species in plasma to form a concave portion on the organic film. Thereafter, the silicon-containing film is sputtered to form silicon-containing protection films on the inner wall surfaces of the concave portion. The concave portion is further etched in its depth direction through the patterned silicon-containing film by use of oxygen active species in plasma. Thus, the concave portion can be further etched while the side walls of the concave portion are protected from active oxygen species.
1. A semiconductor device manufacturing method for etching with plasma a substrate having an organic film, a silicon-containing film on the organic film, and a pattern mask on the silicon-containing film to form a hole or groove in the organic film, the method comprising the steps of:
preparing a substrate having an organic film, a silicon-containing film on the organic film, and a pattern mask on the silicon-containing film;
etching with plasma the silicon-containing film of the substrate and transferring a pattern of the pattern mask onto the silicon-containing film to form a patterned silicon-containing film;
removing the pattern mask using plasma to expose the surface of the silicon-containing film;
etching the surface of the organic film through the patterned silicon-containing film by use of an oxygen active species in plasma to form on the organic film a concave portion having a depth that is smaller than the thickness of the organic film;
sputtering the silicon-containing film to form silicon-containing protection films on the inner wall surfaces of the concave portion; and
further etching the concave portion of the organic film, on which the protection films are formed, in the depth direction of the concave portion through the patterned silicon-containing film by use of an oxygen active species in plasma to form a hole or groove.
2. The semiconductor device manufacturing method according to claim 1 , wherein
the pattern mask is composed of a photoresist film.
3. The semiconductor device manufacturing method according to claim 1 , wherein
the step of transferring a pattern of the pattern mask onto the silicon-containing film includes the steps of: over-etching the silicon-containing film and etching the surface of the organic film to form the concave portion; and etching and removing only a part of the pattern mask.
4. The semiconductor device manufacturing method according to claim 1 , wherein
the step of removing the pattern mask uses plasma produced from a gas including a gas for sputtering a silicon-containing film.
5. The semiconductor device manufacturing method according to claim 1 , wherein
the step of etching the concave portion in its depth direction to form a hole or groove on the organic film uses plasma produced from a gas including a gas for sputtering a silicon-containing film.
6. The semiconductor device manufacturing method according to claim 4 , wherein
the gas for sputtering a silicon-containing film includes a gas composed of Ar, Xe, or He.
7. A semiconductor device manufacturing method for etching with plasma a substrate having an organic film, a silicon-containing film on the organic film, and a pattern mask on the silicon-containing film to form a hole or groove in the organic film, the method comprising the steps of:
preparing a substrate having an organic film;
forming on the organic film provided on the substrate a silicon-containing film having a thickness that is at least one fifth of the thickness of the organic film;
forming on the silicon-containing film a pattern mask for etching the silicon-containing film;
etching with plasma the silicon-containing film of the substrate and transferring a pattern of the pattern mask onto the silicon-containing film to form a patterned silicon-containing film;
removing the pattern mask using plasma to expose the surface of the silicon-containing film;
etching the surface of the organic film through the patterned silicon-containing film by use of an oxygen active species in plasma to form on the organic film a concave portion having a depth that is smaller than the thickness of the organic film;
sputtering the silicon-containing film to form silicon-containing protection films on the inner wall surfaces of the concave portion; and
further etching the concave portion of the organic film, on which the protection films are formed, in the depth direction of the concave portion through the patterned silicon-containing film by use of an oxygen active species in plasma to form a hole or groove.
8. The semiconductor device manufacturing method according to claim 7 , wherein
the pattern mask is composed of a photoresist film.
9. The semiconductor device manufacturing method according to claim 7 , wherein
after forming the concave portion on the organic film, the method further comprising the steps of: forming the protection films on the concave portion; and etching the concave portion formed on the organic film in the depth direction of the concave portion; the steps being repeated in this order to form a hole or groove.
10. The semiconductor device manufacturing method according to claim 5 , wherein
the gas for sputtering a silicon-containing film includes a gas composed of Ar, Xe, or He.
11. The semiconductor device manufacturing method according to claim 8 , wherein
after forming the concave portion on the organic film, the method further comprising the steps of: forming the protection films on the concave portion; and etching the concave portion formed on the organic film in the depth direction of the concave portion; the steps being repeated in this order to form a hole or groove.