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App. No. 12/235,147 · Confirmation No. 5513

Deposition Systems, ALD Systems, CVD Systems, Deposition Methods, ALD Methods and CVD Methods

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2023-02-10 ABN Abandonment 2 View
2022-09-12 CTAV Advisory Action (PTOL-303) 3 View
2022-09-12 A.NE.AFCP.D After Final Consideration Program Decision 1 View
2022-09-12 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2022-08-22 A.NE.AFCP After Final Consideration Program Request 1 View
2022-08-22 A.NE Response After Final Action 1 View
2022-08-22 CLM Claims 2 View
2022-08-22 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2022-08-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-08-22 WFEE Fee Worksheet (SB06) 1 View
2022-07-14 CTFR Final Rejection 10 View
2022-07-14 SRFW Search information including classification, databases and other search related notes 2 View
2022-07-14 SRNT Examiner's search strategy and results 2 View
2022-05-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2022-05-16 CLM Claims 2 View
2022-05-16 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2022-05-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-05-16 WFEE Fee Worksheet (SB06) 1 View
2022-02-14 CTNF Non-Final Rejection 8 View
2022-02-14 SRFW Search information including classification, databases and other search related notes 2 View
2022-02-14 SRNT Examiner's search strategy and results 1 View
2021-11-18 RCEX Request for Continued Examination (RCE) 3 View
2021-11-18 XT/ Extension of Time 1 View
2021-11-18 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2021-11-18 CLM Claims 2 View
2021-11-18 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2021-11-18 WFEE Fee Worksheet (SB06) 2 View
2021-11-18 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-11-18 WFEE Fee Worksheet (SB06) 1 View
2021-10-07 CTAV Advisory Action (PTOL-303) 2 View
2021-10-07 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2021-10-07 A.NE.AFCP.D After Final Consideration Program Decision 1 View
2021-10-07 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2021-09-27 A.NE.AFCP After Final Consideration Program Request 2 View
2021-09-27 A.NE Response After Final Action 1 View
2021-09-27 CLM Claims 2 View
2021-09-27 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2021-09-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-09-27 WFEE Fee Worksheet (SB06) 1 View
2021-09-27 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2021-07-29 CTFR Final Rejection 9 View
2021-07-29 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2021-07-29 SRFW Search information including classification, databases and other search related notes 2 View
2021-07-29 SRNT Examiner's search strategy and results 1 View
2021-07-23 WFEE Fee Worksheet (SB06) 1 View
2021-07-23 SA.. Supplemental Response or Supplemental Amendment 1 View
2021-07-23 CLM Claims 2 View
2021-07-23 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2021-07-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-06-14 WFEE Fee Worksheet (SB06) 1 View
2021-06-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2021-06-14 CLM Claims 2 View
2021-06-14 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2021-06-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-03-17 CTNF Non-Final Rejection 10 View
2021-03-17 SRFW Search information including classification, databases and other search related notes 2 View
2021-03-17 SRNT Examiner's search strategy and results 1 View
2021-01-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2021-01-25 CLM Claims 2 View
2021-01-25 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2021-01-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2020-11-16 CPA-AMD Notice of Informal or Non-Responsive Continued Prosecution Application (CPA) Amendment 5 View
2020-09-29 WFEE Fee Worksheet (SB06) 1 View
2020-09-29 RCEX Request for Continued Examination (RCE) 3 View
2020-09-29 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2020-09-29 CLM Claims 2 View
2020-09-29 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2020-09-29 WFEE Fee Worksheet (SB06) 2 View
2020-09-29 N417 Electronic Filing System Acknowledgment Receipt 3 View
2020-07-29 APDA Patent Board Decision - Examiner Affirmed 12 View
2019-07-02 AP_DK_M Appeal Docketing Notice 2 View
2019-06-30 APRB Reply Brief Filed 12 View
2019-06-30 WFEE Fee Worksheet (SB06) 2 View
2019-06-30 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-04-30 APEA Examiner's Answer to Appeal Brief 9 View
2019-02-04 PET.DEC.TC Petition decision routed to the Technology Center to act on the decision or continue prosecution 2 View
2019-01-21 PET.OP Petition for review by the Office of Petitions 2 View
2019-01-21 SAPB Supplemental Appeal Brief 3 View
2019-01-21 WFEE Fee Worksheet (SB06) 2 View
2019-01-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-11-29 PET.OP.DEC Office of Petitions Decision (PTO-90) 6 View
2018-11-29 IMIS Miscellaneous Internal Document 1 View
2018-11-29 PETDEC Petition Decision 1 View
2018-10-26 PET.OP Petition for review by the Office of Petitions 10 View
2018-10-26 SAPB Supplemental Appeal Brief 3 View
2018-10-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-10-26 ABN Abandonment 2 View
2018-04-11 APBD Notice - Defective Appeal Brief 2 View
2018-03-23 AP.B Appeal Brief Filed 23 View
2018-03-23 WFEE Fee Worksheet (SB06) 2 View
2018-03-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-03-23 XT/ Extension of Time 1 View
2018-01-23 AP.PRE.DEC Pre-Brief Appeal Conference decision 2 View
2017-12-18 AP.PRE.REQ Pre-Appeal Brief Conference Request 1 View
2017-12-18 AP.PRE.REQ Pre-Appeal Brief Conference Request 5 View
2017-12-18 WFEE Fee Worksheet (SB06) 2 View
2017-12-18 N417 Electronic Filing System Acknowledgment Receipt 3 View
2017-12-18 XT/ Extension of Time 1 View
2017-12-18 N/AP Notice of Appeal Filed 1 View
2017-12-07 A.NE.AFCP.D After Final Consideration Program Decision 1 View
2017-12-07 CTAV Advisory Action (PTOL-303) 3 View
2017-12-07 INTV.SUM.EX Examiner initiated interview summary (PTOL-413B) 2 View
2017-12-07 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2017-11-16 A.NE.AFCP After Final Consideration Program Request 1 View
2017-11-16 A.NE Response After Final Action 1 View
2017-11-16 CLM Claims 3 View
2017-11-16 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2017-11-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-11-16 WFEE Fee Worksheet (SB06) 1 View
2017-08-17 CTFR Final Rejection 9 View
2017-08-17 SRFW Search information including classification, databases and other search related notes 2 View
2017-06-27 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2017-06-27 CLM Claims 3 View
2017-06-27 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2017-06-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-06-27 WFEE Fee Worksheet (SB06) 1 View
2017-03-27 CTNF Non-Final Rejection 9 View
2017-03-27 SRFW Search information including classification, databases and other search related notes 1 View
2016-11-04 RCEX Request for Continued Examination (RCE) 3 View
2016-11-04 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2016-11-04 CLM Claims 3 View
2016-11-04 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2016-11-04 WFEE Fee Worksheet (SB06) 2 View
2016-11-04 N417 Electronic Filing System Acknowledgment Receipt 3 View
2016-11-04 WFEE Fee Worksheet (SB06) 1 View
2016-10-12 CTAV Advisory Action (PTOL-303) 3 View
2016-10-12 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2016-10-04 A.NE Response After Final Action 1 View
2016-10-04 CLM Claims 3 View
2016-10-04 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2016-10-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-10-04 WFEE Fee Worksheet (SB06) 1 View
2016-08-04 CTFR Final Rejection 12 View
2016-08-04 SRFW Search information including classification, databases and other search related notes 1 View
2016-07-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2016-07-01 CLM Claims 3 View
2016-07-01 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2016-07-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-07-01 WFEE Fee Worksheet (SB06) 1 View
2016-04-04 CTNF Non-Final Rejection 9 View
2016-04-04 892 List of references cited by examiner 1 View
2016-04-04 SRFW Search information including classification, databases and other search related notes 1 View
2015-12-29 RCEX Request for Continued Examination (RCE) 3 View
2015-12-29 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2015-12-29 CLM Claims 3 View
2015-12-29 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2015-12-29 WFEE Fee Worksheet (SB06) 2 View
2015-12-29 N417 Electronic Filing System Acknowledgment Receipt 3 View
2015-12-29 WFEE Fee Worksheet (SB06) 1 View
2015-11-30 CTAV Advisory Action (PTOL-303) 4 View
2015-11-30 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2015-11-30 A.NE.AFCP.D After Final Consideration Program Decision 1 View
2015-11-16 A.NE.AFCP After Final Consideration Program Request 1 View
2015-11-16 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2015-11-16 CLM Claims 2 View
2015-11-16 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2015-11-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-11-16 WFEE Fee Worksheet (SB06) 1 View
2015-10-02 CTFR Final Rejection 8 View
2015-10-02 SRFW Search information including classification, databases and other search related notes 1 View
2015-08-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2015-08-24 CLM Claims 3 View
2015-08-24 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2015-08-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-06-18 CTNF Non-Final Rejection 8 View
2015-06-18 SRFW Search information including classification, databases and other search related notes 1 View
2014-09-18 RCEX Request for Continued Examination (RCE) 3 View
2014-09-18 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2014-09-18 CLM Claims 3 View
2014-09-18 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2014-09-18 WFEE Fee Worksheet (SB06) 2 View
2014-09-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-09-18 WFEE Fee Worksheet (SB06) 1 View
2014-06-18 CTFR Final Rejection 8 View
2014-06-18 892 List of references cited by examiner 1 View
2014-06-18 SRFW Search information including classification, databases and other search related notes 1 View
2014-06-18 1449 List of References cited by applicant and considered by examiner 1 View
2014-06-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2014-06-05 CLM Claims 3 View
2014-06-05 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2014-06-05 TRAN.LET Transmittal Letter 1 View
2014-06-05 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2014-06-05 WFEE Fee Worksheet (SB06) 2 View
2014-06-05 N417 Electronic Filing System Acknowledgment Receipt 3 View
2014-06-05 WFEE Fee Worksheet (SB06) 1 View
2014-03-05 CTNF Non-Final Rejection 10 View
2014-03-05 892 List of references cited by examiner 1 View
2014-03-05 SRFW Search information including classification, databases and other search related notes 1 View
2014-01-27 RCEX Request for Continued Examination (RCE) 3 View
2014-01-27 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2014-01-27 CLM Claims 2 View
2014-01-27 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2014-01-27 WFEE Fee Worksheet (SB06) 2 View
2014-01-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-01-27 WFEE Fee Worksheet (SB06) 1 View
2014-01-03 CTAV Advisory Action (PTOL-303) 3 View
2014-01-03 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2013-12-26 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2013-12-26 CLM Claims 2 View
2013-12-26 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2013-12-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-12-26 WFEE Fee Worksheet (SB06) 1 View
2013-10-25 CTFR Final Rejection 8 View
2013-10-25 1449 List of References cited by applicant and considered by examiner 1 View
2013-10-25 SRFW Search information including classification, databases and other search related notes 1 View
2013-09-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-09-16 CLM Claims 2 View
2013-09-16 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2013-09-16 TRAN.LET Transmittal Letter 1 View
2013-09-16 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2013-09-16 REF.OTHER Other reference-Patent/Application/Search Documents 7 View
2013-09-16 FOR Foreign Reference 26 View
2013-09-16 WFEE Fee Worksheet (SB06) 2 View
2013-09-16 N417 Electronic Filing System Acknowledgment Receipt 3 View
2013-09-16 WFEE Fee Worksheet (SB06) 1 View
2013-06-14 CTNF Non-Final Rejection 7 View
2013-06-14 SRFW Search information including classification, databases and other search related notes 1 View
2013-06-14 1449 List of References cited by applicant and considered by examiner 1 View
2012-08-17 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2012-08-17 FOR Foreign Reference 14 View
2012-08-17 FOR Foreign Reference 22 View
2012-08-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-08-17 TRAN.LET Transmittal Letter 2 View
2011-12-05 RCEX Request for Continued Examination (RCE) 1 View
2011-12-05 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2011-12-05 SPEC Specification 1 View
2011-12-05 CLM Claims 2 View
2011-12-05 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2011-12-05 WFEE Fee Worksheet (SB06) 2 View
2011-12-05 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-12-05 136A Authorization for Extension of Time all replies 3 View
2011-12-05 WFEE Fee Worksheet (SB06) 1 View
2011-11-02 CTFR Final Rejection 6 View
2011-11-02 892 List of references cited by examiner 1 View
2011-11-02 SRFW Search information including classification, databases and other search related notes 1 View
2011-08-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-08-19 SPEC Specification 1 View
2011-08-19 CLM Claims 2 View
2011-08-19 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2011-08-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-08-19 WFEE Fee Worksheet (SB06) 1 View
2011-08-09 CTNF Non-Final Rejection 6 View
2011-08-09 892 List of references cited by examiner 1 View
2011-08-09 1449 List of References cited by applicant and considered by examiner 2 View
2011-08-09 SRFW Search information including classification, databases and other search related notes 1 View
2011-08-09 SRNT Examiner's search strategy and results 2 View
2011-08-09 1449 List of References cited by applicant and considered by examiner 2 View
2011-07-21 ELC. Response to Election / Restriction Filed 1 View
2011-07-21 SPEC Specification 1 View
2011-07-21 CLM Claims 2 View
2011-07-21 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2011-07-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-07-21 WFEE Fee Worksheet (SB06) 1 View
2011-07-15 CTRS Requirement for Restriction/Election 8 View
2010-03-31 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2010-03-31 TRAN.LET Transmittal Letter 2 View
2010-03-31 371P Documents submitted with 371 (National Stage) Applications 3 View
2010-03-31 371P Documents submitted with 371 (National Stage) Applications 5 View
2010-03-31 FOR Foreign Reference 22 View
2010-03-31 FOR Foreign Reference 14 View
2010-03-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-03-25 NTC.PUB Notice of Publication 1 View
2008-10-08 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-10-08 APP.FILE.REC Filing Receipt 3 View
2008-09-22 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2008-09-22 TRAN.LET Transmittal Letter 2 View
2008-09-22 WFEE Fee Worksheet (SB06) 2 View
2008-09-22 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-09-22 SPEC Specification 14 View
2008-09-22 CLM Claims 7 View
2008-09-22 ABST Abstract 1 View
2008-09-22 DRW Drawings-only black and white line drawings 4 View
2008-09-22 OATH Oath or Declaration filed 3 View
2008-09-22 PA.. Power of Attorney 10 View
2008-09-22 TRAN.LET Transmittal Letter 1 View
2008-09-22 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
12/235,147
Filed
2008-09-22
Pub. No.
US20100075037A1
Art Unit
1741