ANTIREFLECTIVE COATINGS
A method of forming a feature in a substrate comprising the steps of: forming a dielectric layer on a substrate; forming an antireflective coating over the dielectric layer; forming a photoresist pattern over the antireflective coating; etching the dielectric layer through the patterned photoresist; and removing the antireflective coating and the photoresist, wherein the antireflective coating is a film represented by the formula Si v O w C x N u H y F z , wherein v+w+x+u+y+z=100%, v is from 1 to 35 atomic %, w is from 1 to 40 atomic %, x is from 5 to 80 atomic %, u is from 0 to 50 atomic %, y is from 10 to 50 atomic % and z is from 0 to 15 atomic %, wherein the antireflective coating is formed by the chemical vapor deposition of a composition comprising (1) at least one precursor selected from the group consisting of an organosilane, an organosiloxane, and an aminosilane; and (2) a hydrocarbon, and wherein the hydrocarbon is substantially not removed from the antireflective coating.
1 . A method of forming a feature in a substrate comprising the steps of:
forming a dielectric layer on a substrate;
forming an antireflective coating over the dielectric layer;
forming a photoresist pattern over the antireflective coating;
etching the dielectric layer through the patterned photoresist; and
removing the antireflective coating and the photoresist,
wherein the antireflective coating is a film represented by the formula Si v O w C x N u H y F z , wherein v+w+x+u+y+z=100%, v is from 1 to 35 atomic %, w is from 1 to 40 atomic %, x is from 5 to 80 atomic %, u is from 0 to 50 atomic %, y is from 10 to 50 atomic % and z is from 0 to 15 atomic %,
wherein the antireflective coating is formed by the chemical vapor deposition of a composition comprising (1) at least one precursor selected from the group consisting of an organosilane, an organosiloxane, and an aminosilane; and (2) a hydrocarbon, and
wherein the hydrocarbon is substantially not removed from the antireflective coating.
2 . The method of claim 1 wherein the dielectric layer is porous.
3 . The method of claim 1 wherein the antireflective coating is a hardmask.
4 . The method of claim 1 wherein the antireflective coating is formed by the chemical vapor deposition of a composition comprising an aminosilane and a hydrocarbon.
5 . The method of claim 4 wherein the aminosilane is bis(tertiarybutylamino)silane.
6 . The method of claim 1 wherein the hydrocarbon is distinct from the at least one precursor.
7 . The method of claim 6 wherein the at least one precursor is at least one selected from the group consisting of:
(a) the formula R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 4; and p is 0 to 4;
(b) the formula R 1 (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—O—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3 and m+q≦3;
(c) the formula R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that
n+p≦3 and m+q≦3;
(d) the formula R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—R 7 —SiR 3 m (O(O)CR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 6 and R 7 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, alternatively; R 7 is an amine or an organoamine group; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, and m+q≦3;
(e) the formula R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si) t CH 4−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 2 to 4, provided that n+p≦4;
(f) the formula (R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si) t NH 3−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 3, provided that n+p≦4;
(g) cyclic siloxanes of the formula (OSiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; and x is any integer from 2 to 8;
(h) cyclic silazanes of the formula (NR 1 SiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; and x is any integer from 2 to 8;
(i) cyclic carbosilanes of the formula (CR 1 R 3 SiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; and x is any integer from 2 to 8;
(k) the formula R 1 n (OR 2 ) p (NR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; and p is 0 to 3;
(l) the formula R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—O—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3 and m+q≦3;
(m) the formula R 1 n (OR 2 ) p (NR 4 ) 3−m−q Si—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 R 5 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3 and m+q≦3;
(n) the formula R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—R 7 —SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 6 and R 7 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, alternatively, R 7 is an amine or an organoamine group; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, and m+q≦3;
(o) the formula (R 1 n (OR 2 ) p (NR 3 ) 4−(n+p) Si) t CH 4−1 where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 4, provided that n+p≦4; and
(p) the formula (R 1 n (OR 2 ) p (NR 3 ) 4−(n+p) Si) t NH 3−1 where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 3, provided that n+p≦4.
8 . The method of claim 7 wherein the at least one precursor is at least one selected from the group consisting of: diethoxymethylsilane, dimethyldimethoxysilane, dimethyldiacetoxysiiane, methylacetoxy-t-butoxysilane, 1,3-dimethyl-1,3-diethoxydisiloxane, 1,3-dimethyl-1,3-diacetoxydisiloxane, 1,3-dimethyl-1-acetoxy-3-ethoxydisiloxane, 1,3-dimethyl-1,3-diacetoxy-1,3-diethoxydisiloxane, 1,2-dimethyl-1,1,2,2-tetraethoxydisilane, 1,2-dimethyl-1,1,2,2-tetraacetoxydisilane, 1,2-dimethyl-1-acetoxy-2-ethoxydisilane, 1,2-dimethyl-1,2-diacetoxy-1,2-diethoxydisilane, 1,3,5,7-tetramethylcyclotetrasiloxane, and octamethylcyclotetrasiloxane.
9 . The method of claim 7 wherein the hydrocarbon is at least one selected from the group consisting of: cyclohexane, trimethylcyclohexane, 1-methyl-4(1-methylethyl)cyclohexane, cyclooctane, methylcyclooctane, cyclooctene, cyclooctadiene, cycloheptene, cyclopentene, cyclohexene, and 1,5,9-cyclododecatriene, ethylene, propylene, acetylene, neohexane, cyclohexene, vinylcyclohexane, dimethylcyclohexene, t-butylcyclohexene, alpha-terpinene, pinene, 1,5-dimethyl-1,5-cyclooctadiene, vinyl-cyclohexene, norbornane, spiro-nonane, decahydronaphthalene, camphene, norbornene, norbornadiene, and adamantane.
10 . The method of claim 1 wherein the hydrocarbon and the at least one precursor are the same molecule.
11 . The method of claim 10 wherein the at least one precursor is at least one selected from the group consisting of:
a) cyclic siloxanes of the formula (OSiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; and x is an integer from 2 to 8;
b) R 1 n (OR 2 ) p (NR 3 ) 4−(n+p) Si where R 1 is independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; R 2 is independently C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; R 3 is independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; n is 0 to 4; and p is 0 to 4;
c) R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—O—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 R 3 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; R 2 and R 6 are independently C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated, R 4 and R 5 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; n is 0 to 3; m is 0 to 3; p is 0 to 3; and q is 0 to 3;
d) R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−p where R 1 and R 3 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; R 2 and R 6 are independently C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; R 4 and R 5 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; n is 0 to 3; m is 0 to 3; p is 0 to 3; and q is 0 to 3;
e) cyclic siloxanes of the formula (OSi(R 1 ) a (OR 2 ) b (NR 3 ) c X, where R 1 , R 2 and R 3 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; a, b, and c are from 0 to 2; a+b+c=2; and x is an integer from 2 to 8;
f) R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 4; and p is 0 to 4, provided that at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
g) R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—O—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 and R 6 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
h) R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 and R 6 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
i) R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—R 7 —SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 , R 6 , and R 7 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, alternatively, R 7 is an amine or an organoamine group; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 , R 3 and R 7 is substituted with a C 3 or larger hydrocarbon;
j) (R 1 n (OR 2 ) p (O(O)CR 3 ) 3−(n+p) Si) t CH 4−t where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 4, provided that n+p≦4 and at leas of R 1 is substituted with a C 3 or larger hydrocarbon;
k) (R 1 n (OR 2 ) p (O(O)CR 3 ) 3−(n+p) Si) t NH 3−t where R 1 is independently H or C 1 C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 3, provided that n+p≦4 and at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
l) cyclic siloxanes of the formula (OSiR 1 R 3 ) x , where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; and x is any integer from 2 to 8, provided that at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
m) cyclic silazanes of the formula (NR 1 SiR 1 R 3 ) x , where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; and x is any integer from 2 to 8, provided that at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
n) cyclic carbosilanes of the formula (CR 1 R 3 SiR 1 R 3 ) x , where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; and x is any integer from 2 to 8, provided that at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
o) the formula R 1 n (OR 2 ) p (NR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 4; and p is 0 to 4, provided that at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
p) the formula R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—O—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 and R 6 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
q) the formula R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 and R 6 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
r) the formula R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—R 7 —SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 , R 6 , and R 7 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, alternatively, R 7 is an amine or an organoamine group; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 , R 3 and R 7 is substituted with a C 3 or larger hydrocarbon;
s) the formula (R 1 n (OR 2 ) p (NR 3 ) 3−(n+p) Si) t CH 4−t where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 4; p is 0 to 4; and t is 1 to 4, provided that n+p≦4 and at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
t) the formula (R 1 n (OR 2 ) p (NR 3 ) 3−(n+p) Si) t NH 3−t where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 3, provided that n+p≦4 and at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
u) cyclic siloxanes of the formula (OSi(R 1 ) a (OR 2 ) b (NR 3 ) c )x, where R 1 , R 2 and R 3 are independently H or C 1 , to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; x is an integer from 2 to 8; a, b, and c are from 0 to 2 and a+b+c=2, provided that at least one of R 1 , R 2 , and R 3 is substituted with a C 3 or larger hydrocarbon;
v) cyclic silazanes of the formula (NR 1 Si(R 1 ) a (OR 2 ) b (NR 3 ) c )x, where R 1 , R 2 , and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; x is an integer from 2 to 8; a, b, and c are from 0 to 2 and a+b+c=2, provided that at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon; and
w) cyclic carbosilanes of the formula (CR 1 R 3 Si(OR 2 ) b (NR 3 ) c )x, where R 1 , R 2 , and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; x is an integer from 2 to 8; b and c are from 0 to 2 and b+c=2, provided that at least one of R 1 , R 2 and R 3 is substituted with a C 3 or larger hydrocarbon.
12 . The method of claim 11 wherein the at least one precursor is at least one selected from the group consisting of: 1-neohexyl-1,3,5,7-tetramethylcyclotetrasiloxane, dimethylamino-t-butoxy-neo-hexylsilane, diethoxy-neo-hexylsilane, 1,3-diethylamino-1,3-di-t-butoxy-1-neohexyldisiloxane, 1,3-diethoxy-1,3-diphenyidisiloxane, 1,2-dipropylamino-1,2-di-t-butoxy-1-neohexyldisilane, 1,2-diethoxy-1-neo-hexyldisilane, and 1,4-bis(dimethoxysilyl)cyclohexane.
13 . A structure formed during manufacture of a semiconductor device, the structure comprising:
a patternable layer formed above a substrate;
an antireflective coating formed over the patternable layer, wherein the antireflective coating is represented by the formula Si v O w C x N u H y F z , wherein v+w+x+u+y+z=100%, v is from 1 to 35 atomic %, w is from 1 to 40 atomic %, x is from 5 to 80 atomic %, u is from 0 to 50 atomic %, y is from 10 to 50 atomic % and z is from 0 to 15 atomic %; and
a photoresist pattern formed over the antireflective coating,
wherein the antireflective coating is formed by the chemical vapor deposition of (1) at least one precursor selected from the group consisting of an organosilane, an organosiloxane, and an aminosilane; and (2) a hydrocarbon, and wherein the hydrocarbon is substantially not removed from the antireflective coating.
14 . The structure of claim 13 wherein the dielectric layer is porous.
15 . The structure of claim 13 wherein the antireflective coating is a hardmask.
16 . The structure of claim 13 wherein the antireflective coating is formed by the chemical vapor deposition of a composition comprising an aminosilane and a hydrocarbon.
17 . The structure of claim 16 wherein the aminosilane is bis(tertiarybutylamino)silane.
18 . The structure of claim 13 wherein the hydrocarbon is distinct from the at least one precursor.
19 . The structure of claim 18 wherein the at least one precursor is at least one selected from the group consisting of:
(a) the formula R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 4; and p is 0 to 4;
(b) the formula R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—O—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3 and m+q≦3;
(c) the formula R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3 and m+q≦3;
(d) the formula R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—R 7 —SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 6 and R 7 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, alternatively, R 7 is an amine or an organoamine group; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, and m+q≦3;
(e) the formula (R 1 n (OR 2 ) p (O(O)CR 3 ) 3−(n+p) Si) t CH 4−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 2 to 4, provided that n+p≦4;
(f) the formula (R 1 n (OR 2 ) p (O(O)CR 3 ) 3−(n+p) Si) t NH 3−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 3, provided that n+p≦4;
(g) cyclic siloxanes of the formula (OSiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; x is an integer from 2 to 8;
(h) cyclic silazanes of the formula (NR 1 SiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; and x is an integer from 2 to 8;
(i) cyclic carbosilanes of the formula (CR 1 R 3 SiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; and x is an integer from 2 to 8;
(k) the formula R 1 n (OR 2 ) p (NR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; and p is 0 to 3;
(l) the formula R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—O—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3 and m+q≦3;
(m) the formula R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3 and m+q≦3;
(n) the formula R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—R 7 —SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 6 and R 7 are independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, alternatively, R 7 is an amine or an organoamine group; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, and m+q≦3;
(o) the formula (R 1 n (OR 2 ) p (NR 3 ) 3−(n+p) Si) t CH 4 where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 4, provided that n+p≦4; and
(p) the formula (R 1 n (OR 2 ) p (NR 3 ) 3−(n+p) Si) t NH 3−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 3, provided that n+p≦4.
20 . The structure of claim 19 wherein the at least one precursor is at least one selected from the group consisting of: diethoxymethylsilane, dimethyldimethoxysilane, dimethyldiacetoxysilane, methylacetoxy-t-butoxysilane, 1,3-dimethyl-1,3-diethoxydisiloxane, 1,3-dimethyl-1,3-diacetoxydisiloxane, 1,3-dimethyl-1-acetoxy-3-ethoxydisiloxane, 1,3-dimethyl-1,3-diacetoxy-1,3-diethoxydisiloxane, 1,2-dimethyl-1,1,2,2-tetraethoxydisilane, 1,2-dimethyl-1,1,2,2-tetraacetoxydisilane, 1,2-dimethyl-1-acetoxy-2-ethoxydisilane, 1,2-dimethyl-1,2-diacetoxy-1,2-diethoxydisilane, 1,3,5,7-tetramethylcyclotetrasiloxane, and octamethylcyclotetrasiloxane.
21 . The structure of claim 20 wherein the hydrocarbon is at least one selected from the group consisting of: cyclohexane, trimethylcyclohexane, 1-methyl-4(1-methylethyl)cyclohexane, cyclooctane, methylcyclooctane, cyclooctene, cyclooctadiene, cycloheptene, cyclopentene, cyclohexene, and 1,5,9-cyclododecatriene, ethylene, propylene, acetylene, neohexane, cyclohexene, vinylcyclohexane, dimethylcyclohexene, t-butylcyclohexene, alpha-terpinene, pinene, 1,5-dimethyl-1,5-cyclooctadiene, vinyl-cyclohexene, norbornane, spiro-nonane, decahydronaphthalene, camphene, norbornene, norbornadiene, and adamantane.
22 . The structure of claim 13 wherein the hydrocarbon and the at least one precursor are the same molecule.
23 . The structure of claim 22 wherein the at least one precursor is at least one selected from the group consisting of:
a) cyclic siloxanes of the formula (OSiR 1 R 3 )x, where R 1 and R 3 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; and x is an integer from 2 to 8;
b) R 1 n (OR 2 ) p (NR 3 ) 4−(n+p) Si where R 1 is independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; R 2 is independently C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; R 3 is independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; n is 0 to 4; and p is 0 to 4;
c) R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—O—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 R 3 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; R 2 and R 6 are independently C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; R 4 and R 5 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; n is 0 to 3; m is 0 to 3; p is 0 to 3; and q is 0 to 3;
d) R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 R 3 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; R 2 and R 6 are independently C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; R 4 and R 5 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated; n is 0 to 3; m is 0 to 3; p is 0 to 3; and q is 0 to 3;
e) cyclic siloxanes of the formula (OSi(R 1 ) a (OR 2 ) b (NR 3 ) c x, where R 1 , R 2 and R 3 are independently H, C 1 to C 12 , linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated; a, b, and c are from 0 to 2 and a+b+c=2; and x is an integer from 2 to 8;
f) R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 4; and p is 0 to 4, provided that at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
g) R 1 n (OR 2 ) p (O()CR 4 ) 3−n−p Si—O—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 and R 6 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
h) R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 and R 6 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
i) R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—R 7 —SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 , R 6 , and R 7 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, alternatively, R 7 is an amine or an organoamine group; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 , R 3 and R 7 is substituted with a C 3 or larger hydrocarbon;
j) (R 1 n (OR 2 ) p (O(O)CR 3 ) 3−(n+p) Si) t CH 4−t where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 4, provided that n+p≦4 and at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
k) (R 1 n (OR 2 ) p (O(O)CR 3 ) 3−(n+p) Si) t NH 3−t where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 3, provided that n+p≦4 and at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
l) cyclic siloxanes of the formula (OSiR 1 R 3 ) x , where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; and x is any integer from 2 to 8, provided that at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
m) cyclic silazanes of the formula (NR 1 SiR 1 R 3 ) x , where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; and x is any integer from 2 to 8, provided that at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
n) cyclic carbosilanes of the formula (CR 1 R 3 SiR 1 R 3 ) x , where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; and x is any integer from 2 to 8, provided that at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
o) the formula R 1 n (OR 2 ) p (NR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 4; and p is 0 to 4, provided that at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
p) the formula R 1 n (OR 2 ) p (NR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 12 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 and R 6 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
q) the formula R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 and R 6 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon;
r) the formula R 1 n (OR 2 ) p (NR 4 ) 3−n−p Si—R 7 —SiR 3 m (NR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 4 , R 5 , R 6 , and R 7 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, alternatively, R 7 is an amine or an organoamine group; n is 0 to 3; m is 0 to 3; q is 0 to 3; and p is 0 to 3, provided that n+p≦3, m+q≦3, and at least one of R 1 , R 3 and R 7 is substituted with a C 3 or larger hydrocarbon;
s) the formula (R 1 n (OR 2 ) p (NR 3 ) 3−(n+p) Si) t CH 4−t where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 4; p is 0 to 4, and t is 1 to 4, provided that n+p≦4 and at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
t) the formula (R 1 n (OR 2 ) p (NR 3 ) 3−(n+p) Si) t NH 3−t where R 1 is independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 3 are independently C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; n is 0 to 3; p is 0 to 3; and t is 1 to 3, provided that n+p≦4 and at least one of R 1 is substituted with a C 3 or larger hydrocarbon;
u) cyclic siloxanes of the formula (OSi(R 1 ) a (OR 2 ) b (NR 3 ) c )x, where R 1 , R 2 and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; x is an integer from 2 to 8; a, b, and c are from 0 to 2; and a+b+c=2, provided that at least one of R 1 , R 2 , and R 3 is substituted with a C 3 or larger hydrocarbon;
v) cyclic silazanes of the formula (NR 1 Si(R 1 ) a (OR 2 ) b (NR 3 ) c )x, where R 1 , R 2 , and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; x is an integer from 2 to 8; a, b, and c are from 0 to 2; and a+b+c=2, provided that at least one of R 1 and R 3 is substituted with a C 3 or larger hydrocarbon; and
w) cyclic carbosilanes of the formula (CR 1 R 3 Si(OR 2 ) b (NR 3 ) c )x, where R 1 , R 2 , and R 3 are independently H or C 1 to C 12 linear or branched, saturated, singly or multiply unsaturated, cyclic, partially or fully fluorinated hydrocarbon; x is an integer from 2 to 8; b and c are from 0 to 2; and b+c=2, provided that at least one of R 1 , R 2 and R 3 is substituted with a C 3 or larger hydrocarbon.
24 . The structure of claim 23 wherein the at least one precursor is at least one selected from the group consisting of: 1-neohexyl-1,3,5,7-tetramethylcyclotetrasiloxane, dimethylamino-t-butoxy-neo-hexylsilane, diethoxy-neo-hexylsilane, 1,3-diethylamino-1,3-di-t-butoxy-1-neohexyldisiloxane, 1,3-diethoxy-1,3-diphenyldisiloxane, 1,2-dipropylamino-1,2-di-t-butoxy-1-neohexyldisilane, 1,2-diethoxy-1-neo-hexyldisilane, and 1,4-bis(dimethoxysilyi)cyclohexane.