IP Library Granted Patent US 7,768,777
Granted Patent B2
US 7,768,777 · App. 12/246,969 · Granted Aug 3, 2010

Electronic package with direct cooling of active electronic components

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Quick Facts
Patent No.
US 7,768,777
App. No.
12/246,969
Granted
Aug 3, 2010
Kind
B2
Abstract

A cooling assembly includes a package with one or more dies cooled by direct cooling. The cooled package includes one or more dies with active electronic components. A coolant port allows a coolant to enter the package and directly cool the active electronic components of the dies.

Claims (17)

1. A method for cooling a packaged die comprising:

providing a die within a cavity in a package;

placing a liquid coolant into the cavity such that the die is immersed in and surrounded by the coolant;

operating the die causing the die to generate heat;

transferring the heat from the die into the liquid coolant causing the liquid coolant to microboil at a contact surface of the die to produce vaporized coolant; and

recirculating the vaporized coolant through a liquefier to return re-liquefied coolant to the chamber.

2. The method of claim 1 , wherein the providing comprises providing a plurality of dies within the cavity.

3. The method of claim 1 , wherein the liquid coolant is in contact with an active surface of the die.

4. The method of claim 1 , wherein the liquid coolant is in contact with substantially all exterior surfaces of the die.

5. The method of claim 1 , wherein the liquid coolant at the contact surface maintains a substantially constant temperature.

6. The method of claim 1 , wherein the contact surface maintains a substantially constant temperature.

7. The method of claim 1 , wherein the placing comprises placing liquid coolant between an attachment surface of the die and an attachment surface of the package, wherein the attachment surface of the die is attached to the attachment surface of the package via elongate contact elements.

8. The method of claim 1 , wherein the attachment surface is an active surface of the die.

9. The method of claim 1 , wherein the recirculating comprises:

removing the vaporized coolant from the cavity;

removing heat from the vaporized coolant to re-liquify the coolant; and

returning the vaporized coolant to the cavity.

Assignments (2)
RELEASE OF SECURITY INTEREST Recorded Aug 7, 2025
From: HSBC BANK USA, NATIONAL ASSOCIATION
To: FORMFACTOR, INC.
Reel/Frame 072853/0001 →
SECURITY INTEREST IN UNITED STATES PATENTS AND TRADEMARKS Recorded Jul 12, 2016
From: FORMFACTOR, INC.; ASTRIA SEMICONDUCTOR HOLDINGS, INC.; CASCADE MICROTECH, INC.; MICRO-PROBE INCORPORATED
To: HSBC BANK USA, NATIONAL ASSOCIATION
Reel/Frame 039184/0280 →