GaN-based semiconductor light emitting device
View Patent ↗There is provided a GaN-based semiconductor light emitting device including: a substrate; and an n-type GaN-based semiconductor layer, an active layer and a p-type GaN-based semiconductor layer sequentially deposited on the substrate, wherein the active layer includes: a first barrier layer including Al x In y Ga 1−x−y N, where 0<x<1, 0<y<1, and 0<x+y<1; a second barrier layer having an energy band higher than an energy band of the first barrier layer and including one of In x Ga 1−x N, where 0<x<0.2, and GaN; a well layer including In x Ga 1−x N, where 0<x<1; a third barrier layer including one of In x Ga 1−x N, where 0<x<0.2 and GaN; and a lattice mismatch relaxation layer including one of Al x In y Ga 1−x−y N, where 0<x<1, 0<y<1, and 0<x+y<1, Al x Ga 1−x N, where 0<x<1, and GaN, the lattice mismatch relaxation layer having a lattice constant greater than a lattice constant of the well layer and smaller than a lattice constant of the p-type GaN-based semiconductor layer.
1. A GaN-based semiconductor light emitting device comprising:
a substrate; and
an n-type GaN-based semiconductor layer, an active layer and a p-type GaN-based semiconductor layer sequentially deposited on the substrate,
wherein the active layer includes:
a first barrier layer formed on the n-type GaN-based semiconductor layer and comprising Al x In y Ga 1−x−y N, where 0<x<1, 0<y<1, and 0<x+y<1;
a second barrier layer formed on the first barrier layer and having an energy band higher than an energy band of the first barrier layer, the second barrier layer comprising one of In x Ga 1−x N, where 0<x<0.2, and GaN;
a well layer formed on the second barrier layer and comprising In x Ga 1−x N, where 0<x<1;
a third barrier layer formed on the well layer and comprising one of In x Ga 1−x N, where 0<x<0.2 and GaN; and
a lattice mismatch relaxation layer formed on the third barrier and comprising one of Al x In y Ga 1−x−y N, where 0<x<1, 0<y<1, and 0<x+y<1, Al x Ga 1−x N, where 0<x<1, and GaN, the lattice mismatch relaxation layer having a lattice constant greater than a lattice constant of the well layer and smaller than a lattice constant of the p-type GaN-based semiconductor layer.
2. The GaN-based semiconductor light emitting device of claim 1 , wherein the x changes within the lattice mismatch relaxation layer.
3. The GaN-based semiconductor light emitting device of claim 1 , wherein the x is increased to an interface of the p-type GaN-based semiconductor layer from an interface between the lattice mismatch relaxation layer and the third barrier layer.
4. The GaN-based semiconductor light emitting device of claim 1 , wherein the x is decreased to an interface of the p-type GaN-based semiconductor layer from an interface between the lattice mismatch relaxation layer and the third barrier layer.
5. The GaN-based semiconductor light emitting device of claim 1 , further comprising at least one more active layer.
6. The GaN-based semiconductor light emitting device of claim 1 , wherein the Al x In y Ga 1−x−y N, where 0<x<1, 0<y<1, and 0<x+y<1 is doped or undoped.
7. The GaN-based semiconductor light emitting device of claim 6 , wherein the Al x In y Ga 1−x−y N, where 0<x<1, 0<y<1, and 0<x+y<1 is Si-doped.
8. The GaN-based semiconductor light emitting device of claim 1 , wherein the active layer further comprises a fourth barrier layer formed between the third barrier layer and the lattice mismatch relaxation layer, the fourth barrier layer comprising Al x In y Ga 1−x−y N, where 0<x<1, 0<y<1, and 0<x+y<1.
9. The GaN-based semiconductor light emitting device of claim 1 , wherein the second barrier layer has a thickness sufficient to enable tunneling.