Conductive compositions and processes for use in the manufacture of semiconductor devices
View Patent ↗The present invention is directed to a thick film conductive composition comprising: (a) electrically conductive silver powder; (c) fluorine-containing glass frit; dispersed in (d) organic vehicle and devices made therefrom.
1. A semiconductor device comprising:
a semiconductor layer;
an insulating layer over the semiconductor layer;
a sintered electrode formed on the side of the insulating layer opposite to the semiconductor layer, the sintered electrode comprising silver, SiO 2 , Bi 2 O 3 , PbF 2 , penetrating the insulating layer;
wherein the sintered electrode is formed from a thick film paste comprising:
a) electrically conductive silver
b) a glass frit composition comprising 4-26 wt % SiO 2 , 6-52 wt % Bi 2 O 3 and 5-29 wt % PbF 2 , based on wt % of the total glass frit composition; dispersed in
c) an organic vehicle;
wherein the thick film paste penetrates the insulating layer upon sintering.
2. The semiconductor device of claim 1 , wherein the thick film paste further comprises one or more zinc-containing additives.
3. The semiconductor device of claim 1 , wherein at least one of the glass frit compositions comprises 18-26 wt % SiO 2 , based on wt % of the total glass frit composition.
4. The semiconductor device of claim 1 , wherein at least one of the glass frit compositions further comprises 20-52 wt % PbO, 0-1 wt % Al 2 O 3 , 2-7 wt % TiO 2 , and 0-8 wt % B 2 O 3 .
5. The semiconductor device of claim 1 , wherein at least one of the glass frit compositions comprises 0-1 wt % BaO.
6. The semiconductor device of claim 1 , wherein at least one of the glass frit compositions wherein the composition does not comprise BaO.
7. The semiconductor device of claim 2 , wherein the zinc-containing additive comprises ZnO.
8. The semiconductor device of claim 2 , wherein the composition comprises 2-8 wt % zinc-containing additive, and 1-3 wt % glass frit, based on the weight of the total composition.