Microelectronic circuit structure with layered low dielectric constant regions
View Patent ↗The circuit structure includes at least two generally parallel conductor structures, and a plurality of substantially horizontal layers of layer dielectric material interspersed with substantially horizontally extending relatively low dielectric constant (low-k) volumes. The substantially horizontal layers and the substantially horizontally extending volumes are generally interposed between the at least two generally parallel conductor structures. Also included are a plurality of substantially vertically extending relatively low-k volumes sealed within the substantially horizontal layers and the substantially horizontally extending volumes between the at least two generally parallel conductor structures. The substantially vertically extending relatively low-k volumes and the substantially horizontally extending relatively low-k volumes reduce parasitic capacitance between the at least two generally parallel conductor structures as compared to an otherwise comparable microelectronic circuit not including the relatively low-k volumes.
1. An electrical microelectronic circuit structure, comprising:
at least two generally parallel conductor structures;
a plurality of substantially horizontal layers of layer dielectric material interspersed with substantially horizontally extending relatively low dielectric constant (low-k) volumes, said substantially horizontal layers and said substantially horizontally extending volumes being generally interposed between said at least two generally parallel conductor structures; and
a plurality of substantially vertically extending relatively low-k volumes surrounded by an ultra-low-dielectric-constant sealing material and sealed within said substantially horizontal layers and said substantially horizontally extending volumes between said at least two generally parallel conductor structures, said plurality of substantially vertically extending relatively low-k volumes being perpendicular to said substantially horizontally extending relatively low-k volumes when viewed in cross section, said plurality of substantially vertically extending relatively low-k volumes being parallel to said at least two generally parallel conductor structures when viewed in said cross section, said plurality of substantially vertically extending relatively low-k volumes being sealed from said substantially horizontally extending relatively low-k volumes by said sealing material;
wherein said electrical microelectronic circuit structure exhibits reduced parasitic capacitance between said at least two generally parallel conductor structures as compared to an otherwise comparable microelectronic circuit not including said relatively low-k volumes, said relatively low-k volumes having a dielectric constant of from about 1 to about 1.1.
2. The structure of claim 1 , wherein said substantially vertically extending relatively low-k volumes and said substantially horizontally extending relatively low-k volumes contain substantially gaseous material.
3. The structure of claim 2 , wherein said at least two generally parallel conductor structures comprise metallized dual-Damascened via line structures.