Methods of forming metal-containing structures, and methods of forming germanium-containing structures
View Patent ↗Some embodiments include methods of forming metal-containing structures. A first metal-containing material may be formed over a substrate. After the first metal-containing material is formed, and while the substrate is within a reaction chamber, hydrogen-containing reactant may be used to form a hydrogen-containing layer over the first metal-containing material. The hydrogen-containing reactant may be, for example, formic acid and/or formaldehyde. Any unreacted hydrogen-containing reactant may be purged from within the reaction chamber, and then metal-containing precursor may be flowed into the reaction chamber. The hydrogen-containing layer may be used during conversion of the metal-containing precursor into a second metal-containing material that forms directly against the first metal-containing material. Some embodiments include methods of forming germanium-containing structures, such as, for example, methods of forming phase change materials containing germanium, antimony and tellurium.
1. A method of forming a metal-containing structure, comprising:
flowing hydrogen-containing reactant into a reaction chamber having a semiconductor substrate therein, the hydrogen-containing reactant comprising one or both of formic acid and formaldehyde, the semiconductor substrate having a metal-containing surface, the hydrogen-containing reactant forming a hydrogen-containing layer across the metal-containing surface; the metal-containing surface being comprised by a first metal-containing material;
flowing a metal-containing precursor into the reaction chamber, the metal-containing precursor reacting with hydrogen from the hydrogen-containing layer to form a second metal-containing material directly against the metal-containing surface;
wherein the metal-containing precursor and hydrogen-containing reactant are within the reaction chamber at different and substantially non-overlapping times relative to one another; and
wherein the second metal-containing material is purer than the first metal-containing material relative to one or more of oxygen, nitrogen and carbon contamination.
2. The method of claim 1 wherein the hydrogen-containing reactant comprises formic acid.
3. The method of claim 1 wherein the hydrogen-containing reactant comprises formaldehyde.
4. The method of claim 1 wherein the metal-containing surface comprises germanium, and wherein the second metal-containing material also comprises germanium.
5. The method of claim 1 wherein the metal-containing surface comprises antimony or tellurium, and wherein the second metal-containing material comprises germanium.
6. The method of claim 1 further comprising:
flowing the hydrogen-containing reactant into the reaction chamber to form a subsequent hydrogen-containing layer over a surface of the second metal-containing material;
flowing a subsequent metal-containing precursor into the reaction chamber to form a subsequent metal-containing material over the second metal-containing material; and
wherein the subsequent metal-containing precursor and the subsequent hydrogen-containing reactant are within the reaction chamber at different and substantially non-overlapping times relative to one another.
7. The method of claim 6 wherein the second metal-containing material and the subsequent metal-containing material comprise a common metal with one another.
8. The method of claim 7 wherein the common metal is germanium.
9. The method of claim 6 wherein the second metal-containing material and the subsequent metal-containing material comprise different metals relative to one another.
10. A method of forming germanium-containing structures, comprising:
forming an initial germanium-containing surface over a semiconductor substrate; and
after forming the initial germanium-containing surface, performing at least one iteration of the following sequence:
flowing hydrogen-containing reactant into a reaction chamber to form a hydrogen-containing layer across the germanium-containing surface;
removing any unreacted hydrogen-containing reactant from within the reaction chamber; and
after removing unreacted hydrogen-containing reactant from within the reaction chamber, flowing germanium-containing precursor into the reaction chamber, the germanium-containing precursor reacting with hydrogen from the hydrogen-containing layer to form germanium-containing material, the germanium-containing material having a germanium-containing surface for a subsequent iteration;
wherein the forming of the initial germanium-containing surface comprises at least one iteration of an atomic layer deposition sequence utilizing germanium amidinate and reductant;
wherein the reductant comprises one or both of H 2 and NH 3 ;
wherein the at least one iteration of the atomic layer deposition sequence utilizing germanium amidinate and reductant forms a first germanium-containing material;
wherein the sequence utilizing the hydrogen-containing reactant and germanium-containing precursor forms a second germanium-containing material; and
wherein the first germanium-containing material is less pure in germanium than the second germanium-containing material.
11. The method of claim 10 wherein the semiconductor substrate comprises monocrystalline silicon.
12. The method of claim 10 wherein the reductant comprises H 2 .
13. The method of claim 10 wherein the reductant comprises NH 3 .