IP Library Granted Patent US 7,884,441
Granted Patent B2
US 7,884,441 · App. 12/273,841 · Granted Feb 8, 2011

Semiconductor device having polysilicon bit line contact

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Quick Facts
Patent No.
US 7,884,441
App. No.
12/273,841
Granted
Feb 8, 2011
Kind
B2
Abstract

Provided are a semiconductor device and a method of fabricating the same. The semiconductor device includes a plurality of device isolation layers disposed in a semiconductor substrate, the device isolation layers extending in a word line direction and spaced apart from each other; a plurality of floating gate devices extending in a bit line direction perpendicular to the device isolation layer and spaced apart from each other; a source region and a drain region disposed at sides of the floating gate device; an insulation layer disposed on the floating gate device and the source region, and a polysilicon line extending in the word line direction and connected to the drain region.

Claims (13)

1. A semiconductor device comprising:

a plurality of device isolation layers disposed in a semiconductor substrate, the device isolation layers extending in a word line direction and spaced apart from each other;

a plurality of floating gate devices extending in a bit line direction perpendicular to the device isolation layer and spaced apart from each other;

a source region and a drain region disposed at sides of the floating gate devices;

an insulation layer disposed on the floating gate device and the source region; and

a polysilicon line electrically connected to the drain region.

2. The semiconductor device according to claim 1 , wherein the polysilicon line extends in the word line direction.

3. The semiconductor device according to claim 1 , wherein the polysilicon line is disposed in alternation with the device isolation layers on the semiconductor substrate.

4. The semiconductor device according to claim 1 , wherein the polysilicon line contacts the insulation layer on the floating gate device and the source region.

5. The semiconductor device according to claim 1 , wherein the source region is a common source line of an impurity diffusion layer formed through a Self Aligned Source (SAS) process.

6. The semiconductor device according to claim 1 , wherein the floating gate device comprises a tunnel oxide layer, a floating gate, an Oxide-Nitride-Oxide (ONO) layer, and a control gate.

7. The semiconductor device according to claim 1 , further comprising a silicide on the drain region.

8. The semiconductor device according to claim 7 , wherein the polysilicon line contacts the silicide on the drain region.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 28, 2014
From: DONGBU HITEK CO., LTD.
To: DSS TECHNOLOGY MANAGEMENT, INC.
Reel/Frame 033035/0680 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 20, 2008
From: KIM, NAM YOON
To: DONGBU HITEK CO., LTD.
Reel/Frame 021865/0005 →