Semiconductor light emitting device and method of manufacturing the same
View Patent ↗There is provided a method of manufacturing a nitride semiconductor light emitting device. A method of manufacturing a nitride semiconductor light emitting device according to an aspect of the invention may include: nitriding a surface of an m-plane sapphire substrate; forming a high-temperature buffer layer on the m-plane sapphire substrate; depositing a semi-polar (11-22) plane nitride thin film on the high-temperature buffer layer; and forming a light emitting structure including a first nitride semiconductor layer, an active layer, and a second nitride semiconductor layer on the semi-polar (11-22) plane nitride thin film.
1. A nitride semiconductor light emitting device comprising:
a nitrided m-plane sapphire substrate;
a high-temperature buffer layer provided directly on the nitrided m-plane sapphire substrate;
a semi-polar (11-22) plane nitride thin film provided directly on the high-temperature buffer layer; and
a light emitting structure including a first nitride semiconductor layer, an active layer, and a second nitride semiconductor layer on the semi-polar (11-22) plane nitride thin film, the first nitride semiconductor having an exposed portion, wherein the high-temperature buffer layer has a thickness within a range of 1000 to 4000 Å.
2. The nitride semiconductor light emitting device of claim 1 , wherein the nitrided m-plane sapphire substrate is nitrided within an optimum temperature range of 750 to 900° C.
3. The nitride semiconductor light emitting device of claim 1 , wherein the semi-polar (11-22) plane nitride thin film has a thickness of 2 to 3 μm.
4. The nitride semiconductor light emitting device of claim 1 , wherein the semi-polar (11-22) plane nitride thin film has a single crystal structure.
5. The nitride semiconductor light emitting device of claim 1 , further comprising:
a first electrode provided on the exposed portion of the first nitride semiconductor layer; and
a second electrode provided on the second nitride semiconductor layer.