Porous template and imprinting stack for nano-imprint lithography
An imprint lithography template or imprinting stack includes a porous material defining a multiplicity of pores with an average pore size of at least about 0.4 nm. A porosity of the porous material is at least about 10%. The porous template, the porous imprinting stack, or both may be used in an imprint lithography process to facilitate diffusion of gas trapped between the template and the imprinting stack into the template, the imprinting stack or both, such that polymerizable material between the imprinting stack and the template rapidly forms a substantially continuous layer between the imprinting stack and the template.
1. An imprint lithography template comprising a porous material defining a multiplicity of pores with an average pore size of less than about 1 nm, wherein:
the porous material is positioned between a base layer and a cap layer,
the base layer comprises recesses and the porous material is positioned in the recesses, and
a porosity of the porous material is at least about 10%.
2. The template of claim 1 , wherein the average pore size is greater than the kinetic diameter of helium (0.256 nm).
3. The template of claim 1 , wherein the average pore size is larger than a pore size of fused silica.
4. The template of claim 1 , wherein the porosity of the porous material is at least about 20%.
5. The template of claim 1 , wherein the porous material is an organosilicate low-k material.
6. The template of claim 5 , wherein a relative porosity of the porous material with respect to fused silica is at least about 20%.
7. The template of claim 1 , wherein the porous material has a Young's modulus of at least about 2 GPa.
8. The template of claim 1 , wherein the base layer comprises fused silica.
9. The template of claim 1 , wherein the cap layer comprises SiO x , wherein 1≦x ≦2.
10. The template of claim 1 , wherein a thickness of the cap layer is less than about 100 nm.
11. The template of claim 10 , wherein a thickness of the cap layer is less than about 50 nm.
12. The template of claim 11 , wherein a thickness of the cap layer is less than about 20 nm.
13. The template of claim 1 , wherein the cap layer forms a continuous layer over the porous material and comprises a patterned exterior surface.
14. An imprint lithography template comprising a porous material defining a multiplicity of pores with a pore size of less than 1 nm, wherein:
the porous material is positioned between a base layer and a cap layer,
wherein the cap layer forms a continuous layer over the porous material and comprises a patterned exterior surface, and
a porosity of the porous material is in a range of 5% to 45%.
15. The imprint lithography template of claim 14 , wherein the cap layer comprises SiO 2 .
16. The imprint lithography template of claim 14 , wherein a thickness of the cap layer is about 10 nm.
17. An imprint lithography template comprising a porous material defining a multiplicity of pores with a pore size of less than 1 nm, wherein:
the porous material is positioned between a base layer and a cap layer,
the cap layer comprises SiO 2 , and
a porosity of the porous material is in a range of 5% to 45%.
18. The imprint lithography template of claim 17 , wherein the cap layer forms a continuous layer over the porous material and comprises a patterned exterior surface.
19. The imprint lithography template of claim 17 , wherein a thickness of the cap layer is about 10 nm.
20. The imprint lithography template of claim 17 , wherein the base layer comprises fused silica.