Process for manufacturing semiconductor device
View Patent ↗Reduction of damage to a semiconductor device due to a marking process while inhibiting deterioration of a mark can not be achieved in conventional processes for manufacturing semiconductor devices. A process for manufacturing the semiconductor device 100 involves irradiating the marking film 21 with an energy beam through the transparent protective film 31 after the protective film 31 is formed, and such irradiation causes a chemical modification of the material of the marking film 21 to create the marks. According to the above-described process for manufacturing the semiconductor device 100, the region for the marking or the upper surface of the marking film 21 is sheathed by the protective film 31, so that a damage to the semiconductor chip 11 due to the generations of dust, exothermic heat, gas, stress or the like during the marking operation can be reduced. This allows achieving the process for manufacturing the semiconductor device 100 that provides a manufacture of better quality of the marks.
1. A process for manufacturing a semiconductor device, including:
sequentially forming a first film and a second film over a substrate; and
applying an energy beam over said first film through said second film so that said first film is modified by the applied energy beam to create a mark, said second film being transparent to said energy beam and being configured to remain on said first film as part of a finished semiconductor device.
2. The process for manufacturing the semiconductor device as set forth in claim 1 , wherein said energy beam is a laser beam.
3. The process for manufacturing the semiconductor device as set forth in claim 1 , wherein said second film is partially modified in said applying the energy beam.
4. The process for manufacturing the semiconductor device as set forth in claim 1 , wherein said first film contains a material having an ability to absorb said energy beam.
5. The process for manufacturing the semiconductor device as set forth in claim 4 , wherein said first film contains a metallic material.
6. A process for manufacturing a semiconductor device, including:
sequentially forming a first film and a second film over a substrate; and
applying an energy beam over said first film through said second film so that said first film is modified by the applied energy beam to create a mark,
wherein said first film contains at least one of aluminum, nickel, molybdenum, chromium and black colored material.
7. The process for manufacturing the semiconductor device as set forth in claim 4 , wherein said first film contains a black colored material.
8. The process for manufacturing the semiconductor device as set forth in claim 7 , wherein said black colored material contains at least one of a black colored metallic material and carbon black.
9. The process for manufacturing the semiconductor device as set forth in claim 1 , further comprising forming a third film over said substrate, before said sequentially forming a first film and a second film.
10. The process for manufacturing the semiconductor device as set forth in claim 9 , wherein said third film exhibits electroconductivity.
11. The process for manufacturing a semiconductor device as set forth in claim 9 , wherein said third film is metallic.
12. A process for manufacturing a semiconductor device, including:
sequentially forming a first film and a second film over a substrate; and
applying an energy beam over said first film through said second film so that said first film is modified by the applied energy beam to create a mark in said first film, said second film being transmissive for said energy beam, said second film being configured to remain on said first film as part of a finished semiconductor device.
13. The process for manufacturing a semiconductor device as set forth in claim 12 , further comprising forming a third film over said substrate, before said sequentially forming a first film and a second film, said third film being a metallic film.
14. The process for manufacturing the semiconductor device as set forth in claim 5 , wherein said metallic material contains at least one of aluminum, nickel, molybdenum and chromium.
15. The process for manufacturing the semiconductor device as set forth in claim 7 , wherein said first film is formed by spin-coating liquid resin, laminating a film-form resin or depositing material.
16. The process for manufacturing the semiconductor device as set forth in claim 14 , wherein said first film is formed by spin-coating liquid resin, laminating a film-form resin or depositing material.
17. The process for manufacturing the semiconductor device as set forth in claim 6 , wherein said black colored material contains at least one of a black colored metallic material and carbon black.
18. The process for manufacturing the semiconductor device as set forth in claim 6 , wherein said first film is formed by spin-coating liquid resin, laminating a film-form resin or depositing material.