Method of manufacturing superconducting thin film material, superconducting device and superconducting thin film material
View Patent ↗A method of manufacturing a superconducting thin film material includes a vapor phase step of forming a superconducting layer by a vapor phase method and a liquid phase step of forming a superconducting layer by a liquid phase method so that the latter superconducting layer is in contact with the former superconducting layer. Preferably, the method further includes the step of forming an intermediate layer between the former superconducting layer and a metal substrate. The metal substrate is made of a metal, and preferably the intermediate layer is made of an oxide having a crystal structure of any of rock type, perovskite type and pyrochlore type, and the former superconducting layer and the latter superconducting layer both have an RE123 composition. Accordingly, the critical current value can be improved.
1. A method of manufacturing a superconducting thin film material, comprising:
n vapor phase steps, n is an integer of at least 2, each for forming a vapor phase growth superconducting layer by a pulsed laser deposition method; and
n liquid phase steps each for forming a liquid phase growth superconducting layer by a metal organic deposition method, wherein
in a first vapor phase step of said n vapor phase steps, a first vapor phase growth superconducting layer is formed,
in a first liquid phase step of said n liquid phase steps, a first liquid phase growth superconducting layer is formed so that the first liquid phase growth superconducting layer is in contact with said first vapor phase growth superconducting layer,
in a k-th vapor phase step, k is an integer satisfying n≧k≧2, of said n vapor phase steps, a k-th vapor phase growth superconducting layer is formed so that the k-th vapor phase growth superconducting layer is in contact with a (k−1)-th liquid phase growth superconducting layer, and
in a k-th liquid phase step of said n liquid phase steps, a k-th liquid phase growth superconducting layer is formed so that the k-th liquid phase growth superconducting layer is in contact with the k-th vapor phase growth superconducting layer.
2. The method of manufacturing the superconducting thin film material according to claim 1 , further comprising the step of forming a superconducting layer after said n-th liquid phase step so that the superconducting layer is in contact with said n-th liquid phase growth superconducting layer.