Semiconductor device, DRAM integrated circuit device, and method of producing the same
View Patent ↗A semiconductor device with a multi-layer wiring structure includes a first conductive region: a second conductive region that has an upper surface located in a higher position than the first conductive region with respect to the substrate; an insulating that covers the first and second conductive regions; a wiring groove that is formed in the insulating film so as to expose the second conductive region; a contact hole that is formed in the insulating film so as to expose the first conductive region; and a wiring pattern that fills the wiring groove and the contact hole. In this semiconductor device, the upper surface of the wiring pattern is located on the same plane as the upper surface of the insulating film.
1. A method of producing a semiconductor device, comprising the steps of:
forming a first interlayer insulating film on a substrate;
forming an opening in the first interlayer insulating film, the opening penetrating the first interlayer insulating film, so as to expose a first conductive region formed on the substrate;
forming a second conductive region in the opening in such a manner that the second conductive region has an upper surface located in a higher position than a third conductive region that is formed on the substrate;
forming a second interlayer insulating film on the first interlayer insulating film, so as to cover the second conductive region;
forming a wiring groove in the second interlayer insulating film, the wiring groove exposing the upper surface of the first interlayer insulating film, so as to expose the second conductive region;
forming a contact hole or a plurality of contact holes in the wiring groove by etching the first interlayer insulating film, so as to expose the third conductive region;
filling the wiring groove, including the contact hole or the plurality of contact holes, with a conductive material; and
forming a wiring pattern made of the conductive material in the wiring groove, and a contact plug or a plurality of contact plugs made of the conductive material in the contact hole or in the plurality of contact holes, after removing the conductive material on the second interlayer insulating film by a chemical mechanical polishing technique.
2. The method as claimed in claim 1 , further comprising the step of:
forming a step portion in relation to the portion exposing the second conductive region, by etching the surface of the first interlayer insulating film at the portion in which the contact hole or the plurality of contact holes are to be formed, prior to the step of forming the second interlayer insulating film.
3. The method as claimed in claim 1 , wherein the semiconductor device is a DRAM integrated circuit device that has a capacitor formed in the substrate.