Gallium nitride compound semiconductor light-emitting device, method of manufacturing the same, and lamp including the same
The present invention provides a gallium nitride compound semiconductor light-emitting device that prevents an increase in the specific resistance of a p-type semiconductor layer due to hydrogen annealing and reduces the specific resistance of a translucent conductive oxide film to lower a driving voltage Vf, a method of manufacturing the same, and a lamp including the same. The method of manufacturing the gallium nitride compound semiconductor light-emitting device includes: forming a positive electrode 15 composed of a translucent conductive oxide film on a p-type GaN layer 14 of a gallium nitride compound semiconductor device; and a hydrogen annealing process of annealing the positive electrode 15 in a gas atmosphere including hydrogen (H 2 ).
1. A method of manufacturing a gallium nitride compound semiconductor light-emitting device in which a translucent conductive oxide film is formed on an entire surface of a p-type semiconductor layer of a gallium nitride compound semiconductor device, the method comprising:
after forming the translucent conductive oxide film on the entire surface of the p-type semiconductor layer, annealing the translucent conductive oxide film in a gas atmosphere including 0.1 to 5% by volume of hydrogen (H 2 ),
wherein the translucent conductive oxide film has specific resistance of 2.5×10 −4 Ω·cm or less.
2. The method of manufacturing a gallium nitride compound semiconductor light-emitting device according to claim 1 , further comprising:
etching the translucent conductive oxide film to pattern the translucent conductive oxide film after the hydrogen annealing process.
3. The method of manufacturing a gallium nitride compound semiconductor light-emitting device according to claim 1 ,
wherein the hydrogen annealing process is performed at a temperature in the range of 300° C. to 900° C.
4. The method of manufacturing a gallium nitride compound semiconductor light-emitting device according to claim 1 , further comprising:
before the hydrogen annealing process, annealing at a temperature in the range of 200° C. to 300° C. in a gas atmosphere including oxygen (O 2 ).
5. The method of manufacturing a gallium nitride compound semiconductor light-emitting device according to claim 1 ,
wherein, after the hydrogen annealing process, forming a protective layer on the translucent conductive oxide film.
6. A gallium nitride compound semiconductor light-emitting device manufactured by the method according to claim 1 .
7. The method of manufacturing a gallium nitride compound semiconductor light-emitting device according to claim 1 , further comprising:
etching the translucent conductive oxide film to pattern the translucent conductive oxide film before the hydrogen annealing process.
8. The method of manufacturing a gallium nitride compound semiconductor light-emitting device according to claim 7 ,
wherein the hydrogen annealing process is performed at a temperature in the range of 600° C. to 900° C.
9. A gallium nitride compound semiconductor light-emitting device comprising:
a gallium nitride compound semiconductor device including a p-type semiconductor layer; and
a translucent conductive oxide film that is formed on an entire surface of the p-type semiconductor layer,
wherein an annealing process is performed on the translucent conductive oxide film in a gas atmosphere including 0.1 to 5% by volume of hydrogen (H 2 ), and
the translucent conductive oxide film has specific resistance of 2.5×10 −4 Ω·cm or less.
10. The gallium nitride compound semiconductor light-emitting device according to claim 9 ,
wherein the thickness of the translucent conductive oxide film is in the range of 35 nm to 10 μm.
11. The gallium nitride compound semiconductor light-emitting device according to claim 9 ,
wherein the thickness of the translucent conductive oxide film is in the range of 100 nm to 1 μm.
12. A lamp comprising the gallium nitride compound semiconductor light-emitting device according to claim 9 .
13. The gallium nitride compound semiconductor light-emitting device according to claim 9 ,
wherein the translucent conductive oxide film is formed of at least one of ITO (In 2 O 3 —SnO 2 ), IZO (In 2 O 3 —ZnO), IWO (In 2 O 3 —WO 2 ), GZO (ZnO—Ga 2 O 3 ), ZnO, and TiO 2 .
14. The gallium nitride compound semiconductor light-emitting device according to claim 13 ,
wherein the translucent conductive oxide film includes at least ITO.
15. The gallium nitride compound semiconductor light-emitting device according to claim 9 ,
wherein a protective layer is formed on the translucent conductive oxide film.
16. The gallium nitride compound semiconductor light-emitting device according to claim 15 ,
wherein the thickness of the protective layer is in the range of 20 nm to 500 nm.