Method of manufacturing gallium nitride-based compound semiconductor light-emitting device, gallium nitride-based compound semiconductor light-emitting device, and lamp
Provided are a method of manufacturing a gallium nitride-based compound semiconductor light-emitting device with a low driving voltage (Vf) and high light outcoupling efficiency, a gallium nitride-based compound semiconductor light-emitting device, and a lamp. In the method of manufacturing the gallium nitride-based compound semiconductor light-emitting device, a transparent conductive oxide film 15 including a dopant is laminated on a p-type semiconductor layer 14 of a gallium nitride-based compound semiconductor device 1 . The transparent conductive oxide film 15 is subjected to a laser annealing process using a laser after the lamination of the transparent conductive oxide film 15.
1. A method of manufacturing a gallium nitride-based compound semiconductor light-emitting device, in which a transparent conductive oxide film including a dopant is laminated on a p-type semiconductor layer of a gallium nitride-based compound semiconductor device, the method comprising the step of subjecting the transparent conductive oxide film to a laser annealing process using an excimer laser, and the step of subjecting the transparent conductive oxide film to a thermal annealing process at a range of temperature of 200 to 250° C., wherein energy density of the excimer laser in the laser annealing process falls within a range of 150 to 300 mJcm −2 , the p-type semiconductor layer comprises Ga, and the transparent conductive oxide film contains Ga in a concentration of 20 atoms % or below at a location within 1 nm from the interface between the transparent conductive oxide film and the p-type semiconductor layer, and
the laser annealing process includes the step of forming unevenness on a surface of the transparent conductive oxide film using an excimer laser.
2. The method according to claim 1 , wherein the laser annealing process is performed using a KrF excimer laser or an ArF excimer laser as the excimer laser.
3. The method according to claim 1 , wherein the laser annealing process includes irradiating the transparent conductive oxide film with pulses within a range of 1 to 20 times using an excimer laser.