Method for producing a micro-gripper
A method is described for producing a micro-gripper, which comprises a base body and a gripping body connected integrally to the base body, which projects beyond the base body and provides a receptacle slot on a free end area in such a way that a micrometer-scale or sub-micrometer-scale object may be clamped in the receptacle slot for gripping and holding, as well as a micro-gripper according to the species.
1. A method for producing a micro-gripper for clamping a micrometer-scale or sub-micrometer-scale object in a receptacle slot for gripping and holding between a first gripping element and a second gripping element, the method comprising the steps:
providing a flat substrate;
applying a first sacrificial layer over the flat substrate;
forming the first gripping element by applying at least one first material layer to the first sacrificial layer;
applying a second sacrificial layer to an area of the first material layer at least in an area where the receptacle slot is to be formed;
forming the second gripping element by applying a second material layer to the second sacrificial layer in the area where the slot is to be formed and forming a base body of the micro-gripper by applying the second material layer to an area of the first material layer to bond the first material layer to the second material layer;
removing the second sacrificial layer to provide the receptacle slot with free ends respectively comprising the first and second material layers with the receptacle slot being provided between the first material layer and the second material layer; and
removing an area of the first sacrificial layer to detach the micro-gripper from the flat substrate.
2. The method according to claim 1 , further comprising:
applying the first sacrificial layer only to at least one surface area on the flat substrate or, after applying the first sacrificial layer on the flat substrate, structuring the first sacrificial layer.
3. The method according to claim 1 , further comprising:
applying the first material layer to the first sacrificial layer only to at least one surface area of the first sacrificial layer or, after applying the first material layer to the first sacrificial layer, structuring the first material layer.
4. The method according to claim 1 , further comprising:
structuring the second sacrificial layer after applying the second sacrificial layer to an area of the first material layer.
5. The method according to claim 1 , further comprising:
applying the second material layer to at least one area of the second sacrificial layer and to the first material layer or structuring the second material layer after applying the second material layer to the at least one layer of the sacrificial layer and to the first material layer.
6. The method according to claim 1 , further comprising:
applying at least one intermediate layer on the first substrate before applying the first sacrificial layer over the flat substrate.
7. The method according to claim 2 , further comprising:
applying at least one intermediate layer on the first substrate before applying the first sacrificial layer over the flat substrate.
8. The method according to claim 3 , further comprising:
applying at least one intermediate layer on the first substrate before applying the first sacrificial layer over the flat substrate.
9. The method according to claim 4 , further comprising:
applying at least one intermediate layer on the first substrate before applying the first sacrificial layer over the flat substrate.
10. The method according to claim 5 , further comprising:
applying at least one intermediate layer on the first substrate before applying the first sacrificial layer over the flat substrate.
11. The method according to claim 2 , further comprising:
applying at least one stabilization layer to the second material layer.
12. The method according to claim 3 , further comprising:
applying at least one stabilization layer to the second material layer.
13. The method according to claim 4 , further comprising:
applying at least one stabilization layer to the second material layer.
14. The method according to claim 5 , further comprising:
applying at least one stabilization layer to the second material layer.
15. The method according to claim 6 , further comprising:
applying at least one stabilization layer to the second material layer.
16. The method according to claim 7 , further comprising:
applying at least one stabilization layer to the second material layer.
17. The method according to claim 8 , further comprising:
applying at least one stabilization layer to the second material layer.
18. The method according to claim 9 , further comprising:
applying at least one stabilization layer to the second material layer.
19. The method according to claim 10 , further comprising:
applying at least one stabilization layer to the second material layer.
20. The method according to claim 1 , further comprising:
using plastic, ceramic, metal, or silicon oxide as the sacrificial layers.
21. The method according to claim 1 , further comprising:
using plastic, ceramic, metal, semimetal, or polysilicon as the material layers.
22. The method according to claim 1 , further comprising:
structuring the sacrificial layers and/or the first and/or second material layer by masking the layers and chemical etching, reactive ion etching (RIE), sputter etching, ion beam etching, or plasma etching masked layers.
23. The method according to claim 1 , further comprising:
using CVD, LPCVD, PECVD, PVD, or galvanic deposition to provide material deposition.
24. The method according to claim 1 , wherein:
the first and the second material layers are different materials.
25. The method according to claim 2 , further comprising:
clamping the micrometer scale or the sub-micrometer scale object between the first material layer and the second material layer.