Method for formation of miniaturized pattern and resist substrate treatment solution for use in the method
View Patent ↗The present invention provides a method for miniaturizing a pattern without seriously increasing the production cost or impairing the production efficiency. This invention also provides a fine resist pattern and a resist substrate-treating solution used for forming the fine pattern. The pattern formation method comprises a treatment step. In the treatment step, a resist pattern after development is treated with a resist substrate-treating solution containing an amino group-containing, preferably, a tertiary polyamine-containing water-soluble polymer, so as to reduce the effective size of the resist pattern formed by the development. The present invention also relates to a resist pattern formed by that method, and further relates to a treating solution used in the method.
1. A pattern formation method for forming a fine resist pattern, comprising a step in which a resist pattern after development is treated with a resist substrate-treating solution containing an amino group-containing water-soluble polymer, so as to reduce the effective size of said resist pattern formed by the development, further where the water-soluble polymer is selected from a group consisting of poly-N-methylallylamine, poly-N,N′-dimethylallylamine and poly(N-methyl-3,5-piperidinediylmethylene.
2. The pattern formation method according to claim 1 wherein said resist pattern is treated with said resist substrate-treating solution for 10 to 300 seconds.
3. The pattern formation method according to claim 1 , characterized by further comprising the step of washing with pure water immediately before or after the treatment with said resist substrate-treating solution.
4. The pattern formation method according to claim 1 , wherein said resist pattern has a pattern dimension in which a line width of the line-and-space pattern or a hole diameter of the contact hole pattern is not more than 300 nm.
5. A fined resist pattern formed by the steps of: developing an imagewise exposed resist substrate with a developer, and then treating the developed resist substrate with a resist substrate-treating solution containing an amino group-containing water-soluble polymer, further where the water-soluble polymer is selected from a group consisting of poly-N-methylallylamine, poly-N,N′-dimethylallylamine and poly(N-methyl-3,5-piperidinediylmethylene.
6. A resist substrate-treating solution for reducing the effective size of a resist pattern, which comprises a solvent and an amino group-containing water-soluble polymer and with which a resist pattern formed by development is treated to reduce the effective size thereof, further where the water-soluble polymer is selected from a group consisting of poly-N-methylallylamine, poly-N,N′-dimethylallylamine and poly(N-methyl-3,5-piperidinediylmethylene.
7. The pattern formation method according to claim 1 , wherein the amino group-containing water-soluble polymer is poly-N-methylallylamine.
8. The pattern formation method according to claim 1 , wherein the amino group-containing water-soluble polymer is poly-N,N′-dimethylallylamine.
9. The pattern formation method according to claim 1 , wherein the amino group-containing water-soluble polymer is poly(N-methyl-3,5-piperidinediylmethylene).
10. The pattern formation method according to claim 5 , wherein the amino group-containing water-soluble polymer is poly-N-methylallylamine.
11. The pattern formation method according to claim 5 , wherein the amino group-containing water-soluble polymer is poly-N,N′-dimethylallylamine.
12. The pattern formation method according to claim 5 , wherein the amino group-containing water-soluble polymer is poly(N-methyl-3,5-piperidinediylmethylene).
13. The composition according to claim 6 , wherein the amino group-containing water-soluble polymer is poly-N-methylallylamine.
14. The composition according to claim 6 , wherein the amino group-containing water-soluble polymer is poly-N,N′-dimethylallylamine.
15. The composition according to claim 6 , wherein the amino group-containing water-soluble polymer is poly(N-methyl-3,5-piperidinediylmethylene).