IP Library Granted Patent US 7,927,936
Granted Patent B2
US 7,927,936 · App. 12/320,939 · Granted Apr 19, 2011

Laser mask and crystallization method using the same

Assignee: LG Display Co., Ltd.
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,927,936
App. No.
12/320,939
Granted
Apr 19, 2011
Kind
B2
Abstract

A crystallization method includes providing a substrate having a silicon thin film; positioning a laser mask having first to fourth blocks on the substrate, each block having a periodic pattern including a plurality of transmitting regions and a blocking region; and crystallizing the silicon thin film by irradiating a laser beam through the laser mask. A polycrystalline silicon film crystallized by this method is substantially free from a shot mark, and has uniform crystalline characteristics.

Claims (13)

1. A crystallization method comprising:

providing a substrate having a silicon thin film;

positioning a laser mask having first to fourth blocks on the substrate, each block having a periodic pattern including a plurality of transmitting regions and a blocking region,

wherein the laser mask includes a first mask pattern in the first block, a second mask pattern in the second block, a third mask pattern in the third block and a fourth mask pattern in the fourth block, each first to fourth blocks having a periodic pattern including a plurality of transmitting regions and a blocking region;

irradiating a first laser on a certain region of the silicon thin film through the laser mask;

moving the laser mask or a stage having the substrate in a direction of an X axis and irradiating a second laser through the laser mask;

moving the laser mask or the stage in the direction of the X axis and irradiating a third laser through the laser mask; and

moving the laser mask or the stage in the direction of the X axis and irradiating a fourth laser through the laser mask.

2. The method of claim 1 , further comprising

repeatedly performing crystallization of the silicon thin film by a four-shot method in the direction of the X axis; and

moving the laser mask or the stage in a direction of a Y axis and repeatedly performing the four-shot method in the direction of −X axis using the laser mask.

3. The method of claim 2 , wherein the laser mask or the stage is moved by about a distance equal to a size of one block.

4. The method of claim 2 , wherein a movement distance of the laser mask or the stage is determined in order to remove an X-overlap or a Y-overlap.

Assignments (2)
CHANGE OF NAME Recorded Mar 3, 2011
From: LG.PHILIPS LCD CO., LTD.
To: LG DISPLAY CO., LTD.
Reel/Frame 025897/0839 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 9, 2009
From: YOU, JAE SUNG
To: LG.PHILIPS LCD CO., LTD.
Reel/Frame 022284/0646 →
Priority Claims (1)
KR 2003-0099390 · Dec 29, 2003 · national
Continuity (2)
Division 11013876 · Dec 17, 2004
Related Publication 20090156018A1 · Jun 18, 2009