Semiconductor device and method of manufacturing semiconductor device including optical test pattern above a light shielding film
View Patent ↗The semiconductor device of the present invention includes a first insulating film on a substrate having a first region and a second region, a light shielding film formed in the first region and an interconnect film formed in the second region in the first insulating film and a second insulating film having a first concave portion above the light shielding film in the first region and an interconnect hole having a via hole and a second concave portion in the second region in the second insulating film on the first insulating film, wherein an area of the light shielding film is overlapping an area of the first plurality of concave portions.
1. A semiconductor device comprising:
a plurality of active regions and a plurality of test regions;
a first insulating film on a substrate;
a light shielding film formed in the test regions and an interconnect film formed in the active regions in the first insulating film; and
a second insulating film having an optical test pattern above the light shielding film in the test regions and an interconnect hole having a via hole and device components in the active regions in the second insulating film on the first insulating film;
wherein the light shielding film extends continuously in an area underlying the optical test pattern.
2. The semiconductor device according to claim 1 ,
the light shielding film and the interconnect film are formed of copper or copper alloy.
3. The semiconductor device according to claim 1 , wherein an array pattern of the optical test pattern is identical to an array pattern of the device components.
4. The semiconductor device according to claim 1 , wherein the optical test pattern is irradiated with a measuring light for optical measurement to detect the shapes of the optical test pattern, and
the light shielding film has a size equal to or greater than a spot size of the measuring light.
5. The semiconductor device according to claim 1 , wherein the area of the light shielding film is an area of the circle of 2 μm or more in the radius.
6. The semiconductor device according to claim 1 , wherein the substrate is a semiconductor wafer, and wherein the test pattern is located in scribe regions of the semiconductor wafer.
7. The semiconductor device according to claim 1 , wherein the optical test pattern is a grating.
8. The semiconductor device according to claim 1 , wherein the optical test pattern comprises holes having the same shape as via holes.
9. The semiconductor device according to claim 1 , wherein the optical test pattern comprises a series of trenches in said second insulating film filled with metal.
10. The semiconductor device according to claim 1 , wherein the light shielding film has dimensions in a direction parallel to said first insulating film in a range of 30 μm to 80 μm.