Phase change memory devices and methods for fabricating the same
An exemplary phase change memory device is provided, including a substrate with a first electrode formed thereover. A first dielectric layer is formed over the first electrode and the substrate. A plurality of cup-shaped heating electrodes is respectively disposed in a portion of the first dielectric layer. A first insulating layer is formed over the first dielectric layer, partially covering the cup-shaped heating electrodes and the first dielectric layer therebetween. A second insulating layer is formed over the first dielectric layer, partially covering the cup-shaped heating electrodes and the first dielectric layer therebetween. A pair of phase change material layers is respectively disposed on opposing sidewalls of the second insulating layer and contacting with one of the cup-shaped heating electrodes. A pair of first conductive layers is formed on the second insulating layer along the second direction, respectively.
1. A phase change memory (PCM) device, comprising:
a substrate;
a first electrode formed over the substrate;
a first dielectric layer formed over the first electrode and the substrate;
a plurality of cup-shaped heating electrodes, respectively disposed in a portion of the first dielectric layer;
a first insulating layer formed over the first dielectric layer along a first direction, partially covering the cup-shaped heating electrodes and the first dielectric layer therebetween;
a second insulating layer formed over the first dielectric layer along a second direction, partially covering the cup-shaped heating electrodes and the first dielectric layer therebetween;
a pair of phase change material layers respectively disposed on opposing sidewalls of the second insulating layer, wherein each of the pair of phase change material layers physically contact with one of the cup-shaped heating electrodes thereunder; and
a pair of first conductive layers formed on the second insulating layer along the second direction, respectively, wherein one of the first conductive layers contact with one of the phase change material layers.
2. The PCM device as claimed in claim 1 , wherein each of the cup-shaped heating electrodes comprising:
a second conductive layer disposed over the first electrode, wherein the second conductive layer is cup-shaped and comprises an opening; and
a third insulating layer filled in the opening.
3. The PCM device as claimed in claim 2 , wherein the second conductive layer comprises metals, alloys, metal compounds, semiconductor materials or combinations thereof.
4. The PCM device as claimed in claim 1 , wherein the first insulating layer respectively covers half of the top surfaces of the cup-shaped heating electrodes.
5. The PCM device as claimed in claim 1 , wherein the second insulating layer respectively covers half of the top surfaces of the cup-shaped heating electrodes.
6. The PCM device as claimed in claim 1 , wherein the first conductive layers are respectively formed on one of the cup-shaped heating electrodes and are aligned therewith, respectively.
7. The PCM device as claimed in claim 1 , wherein a pitch between the cup-shaped heating electrodes is not greater than an aperture of the cup-shaped heating electrodes.
8. The PCM device as claimed in claim 1 , wherein the first direction is perpendicular to the second direction.