Semiconductor device
View Patent ↗An object is to reduce off-current of a thin film transistor. Another object is to improve electric characteristics of a thin film transistor. Further, it is still another object to improve image quality of a display device using the thin film transistor. An aspect of the present invention is a thin film transistor including a semiconductor film formed over a gate electrode and in an inner region of the gate electrode which does not reach an end portion of the gate electrode, with a gate insulating film interposed therebetween, a film covering at least a side surface of the semiconductor film, and a pair of wirings over the film covering the side surface of the semiconductor film; in which an impurity element serving as a donor is added to the semiconductor film.
1. A semiconductor device comprising a thin film transistor comprising:
a gate electrode having an inner region and an end portion;
a gate insulating film formed over the gate electrode;
a semiconductor film formed on and in contact with the gate insulating film, wherein the semiconductor film overlaps the inner region, and does not overlap the end portion;
a buffer layer formed so as to cover the semiconductor film, wherein the buffer layer is in contact with at least a side surface of the semiconductor film;
a source region on the buffer layer;
a drain region on the buffer layer;
a source wiring formed over the source region and the buffer layer; and
a drain wiring formed over the drain region and the buffer layer, and
wherein the side surface of the semiconductor film faces to any one of the source wiring and the drain wiring, with the buffer layer interposed therebetween.
2. The semiconductor device according to claim 1 ,
wherein the semiconductor film comprises an impurity element serving as a donor.
3. The semiconductor device according to claim 1 ,
wherein the semiconductor film is one selected from the group consisting of an amorphous silicon film, an amorphous silicon germanium film, an amorphous germanium film, a microcrystalline silicon film, a microcrystalline silicon germanium film, a microcrystalline germanium film, a polycrystalline silicon film, a polycrystalline silicon germanium film, and a polycrystalline germanium film.
4. The semiconductor device according to claim 1 ,
wherein the semiconductor film comprises:
crystal grains to which an impurity element is added; and
a first semiconductor layer formed to cover the crystal grains, to which germanium is added.
5. The semiconductor device according to claim 1 ,
wherein the impurity element is any one of phosphorus, arsenic, or antimony.
6. The semiconductor device according to claim 1 ,
wherein the semiconductor device is a display device.
7. A semiconductor device comprising a thin film transistor comprising:
a gate electrode having an inner region and an end portion;
a gate insulating film formed over the gate electrode;
a semiconductor film formed over the gate insulating film, wherein the semiconductor film overlaps the inner region, and does not overlap the end portion;
a buffer layer formed so as to cover the semiconductor film, wherein the buffer layer is in contact with an upper surface and a side surface of the semiconductor film;
a source region on the buffer layer;
a drain region on the buffer layer;
a source wiring formed over the source region and the buffer layer; and
a drain wiring formed over the drain region and the buffer layer,
wherein the side surface of the semiconductor film faces to any one of the source wiring and the drain wiring, with the buffer layer interposed therebetween, and
wherein the buffer layer is an amorphous semiconductor film.
8. The semiconductor device according to claim 7 ,
wherein the semiconductor film comprises an impurity element serving as a donor.
9. The semiconductor device according to claim 7 ,
wherein the semiconductor film is one selected from the group consisting of an amorphous silicon film, an amorphous silicon germanium film, an amorphous germanium film, a microcrystalline silicon film, a microcrystalline silicon germanium film, a microcrystalline germanium film, a polycrystalline silicon film, a polycrystalline silicon germanium film, and a polycrystalline germanium film.
10. The semiconductor device according to claim 7 ,
wherein the semiconductor film comprises:
crystal grains to which an impurity element is added; and
a first semiconductor layer formed to cover the crystal grains, to which germanium is added.
11. The semiconductor device according to claim 7 ,
wherein the impurity element is any one of phosphorus, arsenic, or antimony.
12. The semiconductor device according to claim 7 ,
wherein the semiconductor device is a display device.
13. A semiconductor device comprising a thin film transistor comprising:
a gate electrode having an inner region and an end portion;
a gate insulating film formed over the gate electrode;
a semiconductor film formed over the gate insulating film, wherein the semiconductor film overlaps the inner region, and does not overlap the end portion;
a first buffer layer formed on the semiconductor film;
a second buffer layer so as to cover the semiconductor film and the first buffer layer, wherein the second buffer layer is in contact with a side surface of the semiconductor film and an upper surface of the first buffer layer;
a source region formed on the second buffer layer;
a drain region formed on the second buffer layer;
a source wiring formed on the source region; and
a drain wiring formed on the drain region,
wherein the each of the first and second buffer layers is an amorphous semiconductor film, and
wherein the side surface of the semiconductor film faces to any one of the source wiring and the drain wiring, with the second buffer layer interposed therebetween.
14. The semiconductor device according to claim 13 ,
wherein the semiconductor film comprises an impurity element serving as a donor.
15. The semiconductor device according to claim 13 ,
wherein the semiconductor film is one selected from the group consisting of an amorphous silicon film, an amorphous silicon germanium film, an amorphous germanium film, a microcrystalline silicon film, a microcrystalline silicon germanium film, a microcrystalline germanium film, a polycrystalline silicon film, a polycrystalline silicon germanium film, and a polycrystalline germanium film.
16. The semiconductor device according to claim 13 ,
wherein the semiconductor film comprises:
crystal grains to which an impurity element is added; and
a first semiconductor layer formed to cover the crystal grains, to which germanium is added.
17. The semiconductor device according to claim 13 ,
wherein the impurity element is any one of phosphorus, arsenic, or antimony.
18. The semiconductor device according to claim 13 ,
wherein the semiconductor device is a display device.
19. A semiconductor device comprising a thin film transistor comprising:
a gate electrode having an inner region and an end portion;
a gate insulating film formed over the gate electrode;
a semiconductor film formed over the gate insulating film, wherein the semiconductor film overlaps the inner region, and does not overlap the end portion;
a buffer layer formed over the semiconductor film;
an insulating film formed so as to cover a side surface of the semiconductor film and of the buffer layer;
a source region formed on the insulating film, connected to the buffer layer through a first contact hole;
a drain region formed on the insulating film, connected to the buffer layer through a second contact hole;
a source wiring formed over the source region; and
a drain wiring formed over the drain region,
wherein the buffer layer is an amorphous semiconductor film, and
wherein the side surface of the semiconductor film faces to any one of the source wiring and the drain wiring, with the insulating film interposed therebetween.
20. The semiconductor device according to claim 19 ,
wherein the semiconductor film comprises an impurity element serving as a donor.
21. The semiconductor device according to claim 19 ,
wherein the semiconductor film is one selected from the group consisting of an amorphous silicon film, an amorphous silicon germanium film, an amorphous germanium film, a microcrystalline silicon film, a microcrystalline silicon germanium film, a microcrystalline germanium film, a polycrystalline silicon film, a polycrystalline silicon germanium film, and a polycrystalline germanium film.
22. The semiconductor device according to claim 19 ,
wherein the semiconductor film comprises:
crystal grains to which an impurity element is added; and
a first semiconductor layer formed to cover the crystal grains, to which germanium is added.
23. The semiconductor device according to claim 19 ,
wherein the impurity element is any one of phosphorus, arsenic, or antimony.
24. The semiconductor device according to claim 19 ,
wherein the semiconductor device is a display device.