Misfit dislocation forming interfacial self-assembly for growth of highly-mismatched III-SB alloys
Exemplary embodiments provide high-quality layered semiconductor devices and methods for their fabrication. The high-quality layered semiconductor device can be formed in planar with low defect densities and with strain relieved through a plurality of arrays of misfit dislocations formed at the interface of highly lattice-mismatched layers of the device. The high-quality layered semiconductor device can be formed using various materials systems and can be incorporated into various opto-electronic and electronic devices. In an exemplary embodiment, an emitter device can include monolithic quantum well (QW) lasers directly disposed on a SOI or silicon substrate for waveguide coupled integration. In another exemplary embodiment, a superlattice (SL) photodetector and its focal plane array can include a III-Sb active region formed over a large GaAs substrate using SLS technologies.
1. An emitter device comprising:
a semiconductor substrate;
a first doped layer disposed on the semiconductor substrate that is lattice mismatched with the semiconductor substrate;
an active region disposed over the first doped layer, wherein the active region is proximate to a waveguide material of the semiconductor substrate;
a second doped layer disposed over the active region; and
a plurality of arrays of misfit dislocations laterally propagated throughout an interface between the first doped layer and the semiconductor substrate, wherein the plurality of arrays of misfit dislocations are operable to cause a density of lattice mismatched dislocation defects of about 10 6 cm −2 or less in the first doped layer and a lattice relaxation of about 98% or higher between the first doped layer and the semiconductor substrate, and wherein the semiconductor substrate comprises a silicon-on-insulator (SOI), wherein the active region is disposed at about 100 nm or less to a silicon oxide insulator layer of the SOI.
2. The device of claim 1 , further comprising a transistor based photonic component, wherein the silicon oxide insulator layer guides a light produced by the active region into the transistor based photonic component.
3. The device of claim 1 , wherein the active region comprises a quantum well active region comprising one or more materials selected from the group consisting of GaSb, in GaSb, InSb, AlGaSb, and InAlSb.
4. The device of claim 1 , wherein the second doped layer comprises a conductivity type opposite to a conductivity type of the first doped layer.
5. The device of claim 1 , wherein the second doped layer has a thickness ranging from about 0.1 to about 4 μm.
6. The device of claim 1 , further comprising an operating optical-communication wavelength ranging from about 1.3 μm to about 1.55 μm.
7. The device of claim 1 , wherein the first doped layer is lattice mismatched with the semiconductor substrate by 3% or higher.
8. The device of claim 1 , wherein the first doped layer on the semiconductor substrate further comprises a material pair comprising a pair of III-Sb/silicon.